Film-substrate micro-through-hole-array biochip and preparation method thereof
A technology of biochip and manufacturing method, which is applied in the field of biological and medical detection, can solve problems such as uneven aperture, single shape, and high price, and achieve the effects of good repeatability, flexible design, and low cost
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Example Embodiment
[0024] Example one:
[0025] The PI film substrate micro-via array biochip involved in this embodiment is such as figure 1 As shown, the structure is as follows:
[0026] With a thickness of 10μm, it is a uniform and transparent PI film 1, with an array of micro-vias 2 distributed on the film 1. The micro-vias are circular and have an all-through structure, with a hole diameter of 8μm, and the ratio of the hole diameter to the gap between the holes is 1: 1. The arrangement of the micro-via array 2 is rectangular. The scanning electron microscope picture is as Figure 5 Shown.
[0027] The flow chart of the manufacturing method of the PI film substrate micro-via array biochip involved in this embodiment is as follows Figure 4 As shown, the steps are as follows:
[0028] (1) In a 500ml beaker, add 239.1g of dimethylacetamide, then add 2.3g of p-phenylenediamine, 24.3g of 4,4'-diaminodiphenyl ether, 21.8g of pyromellitic dianhydride, and 12.6 g of pyromellitic dianhydride was reacted...
Example Embodiment
[0032] Embodiment two:
[0033] The PMMA film substrate micro-via array biochip involved in this embodiment is such as figure 2 As shown, the structure is as follows:
[0034] With a thickness of 5μm, it is a uniform and transparent PMMA film 1, with a micro-via array 2 distributed on the film 1. The micro-vias are square and have an all-through structure. The aperture of the micro-vias is 4μm, and the ratio of the aperture to the gap between the holes is 1:5, the arrangement of micro-via array 2 is rectangular.
[0035] The flow chart of the manufacturing method of a PMMA film substrate micro-via array biochip involved in this embodiment is as follows Figure 4 As shown, the steps are as follows:
[0036] (1) Weigh 3g of PMMA particles with an electronic balance, put them into a glass bottle containing 30ml of glacial acetic acid, stir and let stand for 2 hours to obtain a PMMA solution. The PMMA solution was coated on the silicon wafer, the homogenizing speed was 2000 rpm, and it ...
Example Embodiment
[0040] Embodiment three:
[0041] The PU film substrate micro-via array biochip involved in this embodiment is such as image 3 As shown, the structure is as follows:
[0042] It is a uniform and transparent PU film 1 with a thickness of 60μm. The film 1 has a micro-via array 2 distributed on it. The micro-vias are regular hexagons and have an all-through structure. The pore size is 50μm, and the ratio of the pore size to the gap between the holes is 1. :10. The arrangement of microvia array 2 is regular hexagonal distribution.
[0043] The flow chart of the manufacturing method of a micro-through hole array biochip with a PU film substrate involved in this embodiment is as follows Figure 4 As shown, the steps are as follows:
[0044] (1) Put 106g of acrylate and 110g of polyethylene glycol into the flask, heat to 50℃, slowly add 196g of toluene diisocyanate into the flask while stirring, keep it for 2 hours, slowly reduce to room temperature, add and dilute The agent is evenly mixe...
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