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Multilayered gradient composite chromium carbide coating on substrate surface and preparation method of multilayered gradient composite chromium carbide coating

A composite coating and chromium carbide technology, applied in the coating, metal material coating process, ion implantation plating, etc., can solve the problems of brittle fracture of the coating, increase the brittleness of the coating, and poor toughness, so as to reduce the internal stress , low wear rate, low friction coefficient effect

Active Publication Date: 2017-03-29
宁波奥深科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, CrC itself has poor toughness, and the residual stress generated by the PVD process during the coating preparation process will further increase the brittleness of the coating. Under the action of high contact stress cycles, the CrC coating often suffers from brittle fracture or even peeling off.
[0005] At present, there are few reports on the research on improving the toughness of CrC coatings by releasing the internal stress of CrC coatings through multi-layer gradient structure design.

Method used

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  • Multilayered gradient composite chromium carbide coating on substrate surface and preparation method of multilayered gradient composite chromium carbide coating
  • Multilayered gradient composite chromium carbide coating on substrate surface and preparation method of multilayered gradient composite chromium carbide coating
  • Multilayered gradient composite chromium carbide coating on substrate surface and preparation method of multilayered gradient composite chromium carbide coating

Examples

Experimental program
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Effect test

Embodiment 1

[0058] In this example, a CrC multi-layer gradient composite coating was prepared on the stainless steel-based sealing ring in key marine components. The preparation method is as follows:

[0059] (1) Pre-plating treatment

[0060] Put the substrate in petroleum ether, and use ultrasonic stirring to clean it for 15 minutes. After removing the oil on the surface of the substrate, put it into acetone and ultrasonically clean it for 15 minutes, then ultrasonically clean it in absolute ethanol for 15 minutes, and finally take it out and dry it with nitrogen;

[0061] (2) Bias reverse sputter cleaning

[0062] Put the substrate treated in step (1) into the multi-arc ion plating chamber, the temperature of the chamber is 350°C, and the back vacuum is pre-evacuated to 4.00×10 -3 Pa; then, pass Ar gas with a purity greater than or equal to 99.999% into the cavity, the Ar gas flow rate is 100 sccm, the substrate is applied with a negative bias voltage, and the substrate is continuousl...

Embodiment 2

[0079] In the present embodiment, the matrix is ​​exactly the same as that in Example 1, and a CrC multilayer gradient composite coating is prepared on the surface of the matrix, and the preparation method is as follows:

[0080] (1) is identical with the step (1) in embodiment 1;

[0081] (2) same as step (2) in embodiment 1;

[0082] (3) same as step (3) in embodiment 1;

[0083] (4) same as step (4) in embodiment 1;

[0084] (5) Deposition of CrCN gradient transition layer

[0085] Cut off the inflow of Ar, and feed N into the cavity at the same time 2 and C 2 h 2 . N 2 The flow rate is set to 600sccm; C 2 h 2 The initial flow rate was set at 0 sccm and the stop flow rate was set at 70 sccm, increasing uniformly during the deposition process. Apply a deposition negative bias of -20V to the substrate, apply a current of 60A to the Cr target, and deposit at a deposition temperature of 400°C for 30 minutes on the surface of the CrN layer to obtain a CrCN gradient trans...

Embodiment 3

[0095] In the present embodiment, the matrix is ​​exactly the same as that in Example 1, and a CrC multilayer gradient composite coating is prepared on the surface of the matrix, and the preparation method is as follows:

[0096] (1) is identical with the step (1) in embodiment 1;

[0097] (2) same as step (2) in embodiment 1;

[0098] (3) same as step (3) in embodiment 1;

[0099] (4) same as step (4) in embodiment 1;

[0100] (5) Deposition of CrCN gradient transition layer

[0101] Cut off the inflow of Ar, and feed N into the cavity at the same time 2 and C 2 h 2 . N 2 The flow rate is set to 600sccm; C 2 h 2 The initial flow rate was set to 0 sccm, and the termination flow rate was set to 50 sccm, which increased uniformly during the deposition process. Apply a deposition negative bias of -20V to the substrate, apply a current of 60A to the Cr target, and deposit at a deposition temperature of 400°C for 30 minutes on the surface of the CrN layer to obtain a CrCN...

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Abstract

The invention provides a multilayered gradient composite chromium carbide coating on a substrate surface. The composite coating comprises a Cr layer, a CrN layer, a CrCN layer and a CrC layer that are upwards laminated in sequence on the substrate surface. Compared with an existing single-layer CrC coating, the multilayered gradient structure can alleviate the differences of the coating and a substrate in constitution, structure and physical property, reduce the stress of the coating and remarkably improve the frictional wear performance of the coating. The invention also provides a method for preparing the multilayered gradient composite chromium carbide coating by adopting a multi-arc ion plating technique in which the metal Cr is taken as a target material, high-purity Ar is taken as a working gas and C2H2 and N2 are taken as reacting gases; and the constituents and structure of each layer can be controlled by regulating the flow rate of each type of gas.

Description

technical field [0001] The invention relates to a chromium carbide coating on the surface of a substrate, in particular to a chromium carbide multilayer gradient composite coating on the surface of a substrate and a preparation method thereof. Background technique [0002] Nitride or carbide coatings of transition metals are called hard coatings. This type of coating has high hardness and good chemical stability, and has good resistance to corrosion under special conditions such as high temperature, high speed and high pressure. Wear and corrosion resistance, is widely used in industrial production. [0003] The common preparation methods of hard coatings include magnetron sputtering, multi-arc ion plating, etc. Among them, the hard coating prepared by multi-arc ion plating has high hardness, good compactness, and high chemical stability, but during the coating growth process It is often accompanied by the formation of defects such as droplets, micropores, and intercrystall...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/32C23C14/14C23C14/06
CPCC23C14/0635C23C14/0641C23C14/0664C23C14/14C23C14/325
Inventor 姜欣王永欣鲁侠李金龙王立平
Owner 宁波奥深科技有限公司
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