This invention discloses a method for preparing a hierarchical
frustum-shaped porous synergistic light-
trapping SERS substrate and its application, belonging to the field of surface-enhanced
Raman spectroscopy and
microfluidics. The preparation steps include: S1, self-
assembly of
monolayer PS microspheres onto a PI film; S2, formation of a
frustum structure on the PI surface via ICP
etching; S3, removal of residual PS
microsphere template by
toluene dissolution and formation of a micron-scale pit array using PDMS molding; S4, self-
assembly of
monolayer PS nanospheres within the micron-scale pits and covering the nanosphere array with SU-8
photoresist; S5, cross-linking of SU-8 with UV
exposure and removal of the nanospheres to form nanopores; S6,
electron beam
evaporation of a
gold film; S7, substrate characterization; S8, substrate functionalization; S9, fabrication of a
microfluidic chip and sealing with the SERS substrate; S10, heavy
metal ion trace detection. The hierarchical
frustum-shaped porous synergistic light-
trapping SERS substrate proposed in this invention exhibits excellent structural uniformity and
chemical stability, good
oxidation resistance, and high-density hotspots. Its micro-nano synergistic structure can effectively improve
light energy utilization efficiency and form abundant
surface plasmon resonance regions, thereby enhancing
Raman scattering signals, which has important application value for trace detection of analytes.