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Norbornene, tetrafluoroethylene and perfluoromethyl vinyl ether ternary copolymerized catalyst and ternary copolymerization method

A perfluoromethyl vinyl ether ternary copolymerization catalyst and perfluoromethyl vinyl ether technology are applied in the field of high polymers and can solve the problems of low degree of copolymer alternation, small molecular weight of copolymers, and low yield of copolymers, etc. problem, to achieve the effect of low absorbance, low reaction temperature and good corrosion resistance

Active Publication Date: 2017-06-13
NINGBO UNIVERSITY OF TECHNOLOGY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

A.E.Feiring and M.Toriumi et al. used norbornene, tetrafluoroethylene and acrylate free radical ternary copolymerization, etc., which generally have the disadvantages of long reaction time, low yield of copolymer, small molecular weight of copolymer, and low degree of alternation of copolymer.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0024] In a three-necked flask with a dry inert gas atmosphere, 0.001 mole of two (t-butylcyclopentadienyl) titanium dichloride (IV) and 0.001 mole of 8-hydroxyquinoline were dissolved in 10 milliliters of benzene to obtain a mixed solution; Install an electric stirrer to stir, drop 0.006 mol of triisobutylaluminum into the mixed solution at 200 rpm, and stir at 30° C. for 30 minutes at a constant temperature after the dropping, to obtain a titanium-aluminum complex catalyst.

[0025] Add 0.01 mole of bicyclo[2,2,1]hept-2-ene, 0.01 mole of tetrafluoroethylene and 0.01 mole of perfluoromethyl vinyl ether into an autoclave that has been evacuated several times and filled with nitrogen, and dissolved in 20ml of benzene . Bicyclo[2,2,1]hept-2-ene, tetrafluoroethylene, perfluoromethyl vinyl ether based on the amount of bis(t-butylcyclopentadienyl)titanium(IV) dichloride in the catalyst 0.01% of the total weight of the three is taken from the above-mentioned titanium-aluminum compl...

Embodiment 2

[0028] In a three-necked flask with a dry inert gas atmosphere, 0.001 mol of bis(t-butylcyclopentadienyl)titanium(IV) dichloride and 0.014 mol of α,α'-bipyridine were dissolved in 10 ml of toluene to obtain a mixture Solution; install an electric mixer to stir, drop 0.008 mole of triisobutylaluminum into the mixed solution at 250 rpm, and then stir at 50°C for 50 minutes at a constant temperature to obtain a titanium-aluminum complex catalyst.

[0029] Add 0.01 mole of bicyclo[2,2,1]hept-2-ene, 0.01 mole of tetrafluoroethylene and 0.01 mole of perfluoromethyl vinyl ether into an autoclave that has been evacuated several times and filled with nitrogen, and dissolved in 20ml of toluene . Bicyclo[2,2,1]hept-2-ene, tetrafluoroethylene, perfluoromethyl vinyl ether based on the amount of bis(t-butylcyclopentadienyl)titanium(IV) dichloride in the catalyst 0.08% of the total weight of the three is taken from the above-mentioned titanium-aluminum complex catalyst, and injected into th...

Embodiment 3

[0031] In a three-necked flask with a dry inert gas atmosphere, 0.001 mole of bis(t-butylcyclopentadienyl) titanium dichloride (IV) and 0.016 mole of phenanthroline were dissolved in 10 milliliters of tetrahydrofuran to obtain a mixed solution; Stir with an electric stirrer, drop 0.012 mol of triethylaluminum into the mixed solution at 300 rpm, and stir at 40°C for 40 minutes at a constant temperature to obtain a titanium-aluminum complex catalyst.

[0032]Add 0.01 mole of 1-methylbicyclo[2,2,1]hept-2-ene, 0.01 mole of tetrafluoroethylene and 0.01 mole of perfluoromethyl vinyl ether into an autoclave that has been evacuated several times and filled with nitrogen, Add 20ml tetrahydrofuran to dissolve. 1-methylbicyclo[2,2,1]hept-2-ene, tetrafluoroethylene, perfluoromethane based on the amount of bis(t-butylcyclopentadienyl)titanium(IV) dichloride in the catalyst 1.50% of the total weight of the three base vinyl ethers is taken from the above-mentioned titanium-aluminum complex ...

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PUM

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Abstract

The invention relates to a norbornene, tetrafluoroethylene and perfluoromethyl vinyl ether ternary copolymerized catalyst and a ternary copolymerization method, and is characterized in that the preparation method of the catalyst comprises the following steps: in a dry container with an inert gas atmosphere, dissolving di(t-butylcyclopentadienyl)titanium (IV) dichloride and a ligand in a first solvent, to obtain a mixed solution; then dropping alkyl aluminum into the mixed solution, and stirring for 30-60 minutes at the temperature of 30-60 DEG C, to obtain a titanium-aluminum complex catalyst; taking a norbornene monoer, tetrafluoroethylene and a perfluoromethyl vinyl ether monomer according to the molar ratio of 1:1:1, adding the components into a high pressure kettle vacuumized for multiple times and filled with nitrogen, adding a second solvent, and dissolving; then adding the titanium-aluminum complex catalyst, and completing a reaction under certain conditions; and washing and drying the reaction product to obtain the norbornene, tetrafluoroethylene and perfluoromethyl vinyl ether ternary copolymerized catalyst.

Description

technical field [0001] The invention relates to the field of high polymers, in particular to a norbornene-based tetrafluoroethylene and perfluoromethyl vinyl ether ternary copolymerization catalyst and a ternary copolymerization method. Background technique [0002] Polynorbornene is a special polymer with excellent mechanical properties, heat resistance, solubility in organic solvents and transparency, and can be used for 157nm ultraviolet lithography. The main disadvantages of this material are brittleness, poor viscosity and low molecular weight. After fluorine-containing vinyl is inserted into the main chain of polynorbornene, the cohesiveness and solubility of the polymer can be improved, and the light absorption rate of the material itself can be reduced. This copolymer can be used as a photoresist material for 157nm printing technology, such as A.E. Feiring and M.Toriumi used norbornene, tetrafluoroethylene and acrylate copolymers as photolithographic materials, and ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C08F232/08C08F214/26C08F216/14C08F4/6592
CPCC08F4/65925C08F214/262C08F216/1408C08F232/08
Inventor 黄辉房江华王江波胡敏杰高浩其杨建平王志强陈斌
Owner NINGBO UNIVERSITY OF TECHNOLOGY
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