Titanium diboride-zirconium diboride coating with periodic multilayer structure and its preparation method and application

A technology of titanium diboride and zirconium diboride, which is applied in the direction of coating, metal material coating process, vacuum evaporation plating, etc., can solve the problems of high brittleness, poor bonding force between film and substrate, and low hardness, and achieve Low cost, convenient operation and short preparation cycle
CN106987800BActive Publication Date: 2019-04-23GUANGDONG UNIV OF TECH
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
GUANGDONG UNIV OF TECH
Publication Date
2019-04-23

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Abstract

The invention belongs to the field of surface protection technologies and related coating technologies and discloses a titanium-diboride-zirconium-diboride coating of a periodic multilayer structure and a preparation method and application of the titanium-diboride-zirconium-diboride coating. With titanium diboride ceramic targets and zirconium diboride ceramic targets as raw materials, the coating is formed by periodically superposing titanium diboride nanometer ceramic layers and zirconium diboride nanometer ceramic layers on a base body in an alternative sputtering deposition manner by means of multi-target magnetic control sputtering. According to the coating, due to the fact that the nanometer multilayer structure is introduced, the frictional coefficient of a multilayer film is lower than the frictional coefficient of two single layers, and the coefficient of friction between the multilayer film and a GCr15 steel ball is lower than 0.30, so that the excellent wear resistance is presented, and the titanium-diboride-zirconium-diboride coating can be used as a protection coating for engineering application occasions needing the high hardness and high wear resistance, such as protection of surfaces of products of mechanical parts, knife dies and the like. The titanium-diboride-zirconium-diboride coating is convenient to operate, simple in process, short in manufacturing period, low in cost and capable of facilitating large-scale industrial production.
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Description

technical field

[0001] The invention belongs to the field of surface protection technology and related coating technology, and relates to a superhard multilayer coating, more specifically, to a coating with high hardness, high electrical and thermal conductivity, good high temperature oxidation resistance and toughness Titanium diboride (TiB) with periodic multilayer structure 2 )-zirconium diboride (ZrB 2 ) coating and its preparation method and application. Background technique

[0002] With the development of society and the advancement of industrial technology, the industrial field has put forward higher and higher requirements for the performance of materials. In many engineering applications, materials are required to have excellent comprehensive properties; not only high hardness and corrosion resistance are required , It is also required to have a low coefficient of friction, good high temperature stability, etc. In order to meet the increasingly complex and diver...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
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