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Titanium diboride-zirconium diboride coating with periodic multilayer structure and its preparation method and application

A technology of titanium diboride and zirconium diboride, which is applied in the direction of coating, metal material coating process, vacuum evaporation plating, etc., can solve the problems of high brittleness, poor bonding force between film and substrate, and low hardness, and achieve Low cost, convenient operation and short preparation cycle

Active Publication Date: 2019-04-23
GUANGDONG UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] In order to solve the TiB in the prior art 2 and ZrB 2 The low hardness, high brittleness, and poor bonding between the film and the substrate and the shortcomings in the coating, the primary purpose of the present invention is to provide a periodic multilayer structure of titanium diboride (TiB 2 )-zirconium diboride (ZrB 2 )coating;

Method used

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  • Titanium diboride-zirconium diboride coating with periodic multilayer structure and its preparation method and application
  • Titanium diboride-zirconium diboride coating with periodic multilayer structure and its preparation method and application
  • Titanium diboride-zirconium diboride coating with periodic multilayer structure and its preparation method and application

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Experimental program
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Effect test

Embodiment 1

[0034] S1. Cleaning the substrate: send the polished WC-Co cemented carbide substrate into an ultrasonic cleaning machine, and use acetone and absolute ethanol to perform ultrasonic cleaning at 30kHz for 10 minutes, then clean it with deionized water, and then clean it with purity ≥ 99.5% nitrogen blow dry.

[0035] S2. Vacuuming and ion beam etching to clean the cavity and substrate: install TiB on the ion coating machine 2 and ZrB 2 For ceramic targets, clean the coating chamber with a high-power vacuum cleaner; place the ultrasonically cleaned substrate on the workpiece support in the vacuum chamber, and pump it to a vacuum of 5.0×10 -3 Below Pa, then turn on the ion source, pass 80sccm argon gas into the ion source, set the ion source power to 0.9kW, set the workpiece support bias to -300V, and the etching cleaning process lasts for 20min.

[0036] S3. Ion beam etching substrate: rotate the turret, place the substrate in front of the ion source, set the bias voltage to -...

Embodiment 2

[0043] S1. Cleaning the substrate: send the polished (100) oriented single crystal silicon substrate into an ultrasonic cleaning machine, perform ultrasonic cleaning with acetone and absolute ethanol at 30kHz for 10min respectively, then rinse with deionized water, and then use Nitrogen with a purity ≥ 99.5% is blown dry.

[0044] S2. Vacuuming and ion beam etching to clean the cavity and substrate: install TiB on the ion coating machine 2 and ZrB 2 For ceramic targets, clean the coating chamber with a high-power vacuum cleaner; place the ultrasonically cleaned substrate on the workpiece support in the vacuum chamber, and vacuum the vacuum chamber to a vacuum of 5.0×10 -3 Below Pa, then turn on the ion source, feed 80sccm argon gas into the ion source, set the ion source power to 0.9kW, set the workpiece support bias to 300V, and the etching and cleaning process lasts for 20min.

[0045] S3. Ion beam etching substrate: rotate the turret, place the substrate in front of the i...

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Abstract

The invention belongs to the field of surface protection technologies and related coating technologies and discloses a titanium-diboride-zirconium-diboride coating of a periodic multilayer structure and a preparation method and application of the titanium-diboride-zirconium-diboride coating. With titanium diboride ceramic targets and zirconium diboride ceramic targets as raw materials, the coating is formed by periodically superposing titanium diboride nanometer ceramic layers and zirconium diboride nanometer ceramic layers on a base body in an alternative sputtering deposition manner by means of multi-target magnetic control sputtering. According to the coating, due to the fact that the nanometer multilayer structure is introduced, the frictional coefficient of a multilayer film is lower than the frictional coefficient of two single layers, and the coefficient of friction between the multilayer film and a GCr15 steel ball is lower than 0.30, so that the excellent wear resistance is presented, and the titanium-diboride-zirconium-diboride coating can be used as a protection coating for engineering application occasions needing the high hardness and high wear resistance, such as protection of surfaces of products of mechanical parts, knife dies and the like. The titanium-diboride-zirconium-diboride coating is convenient to operate, simple in process, short in manufacturing period, low in cost and capable of facilitating large-scale industrial production.

Description

technical field [0001] The invention belongs to the field of surface protection technology and related coating technology, and relates to a superhard multilayer coating, more specifically, to a coating with high hardness, high electrical and thermal conductivity, good high temperature oxidation resistance and toughness Titanium diboride (TiB) with periodic multilayer structure 2 )-zirconium diboride (ZrB 2 ) coating and its preparation method and application. Background technique [0002] With the development of society and the advancement of industrial technology, the industrial field has put forward higher and higher requirements for the performance of materials. In many engineering applications, materials are required to have excellent comprehensive properties; not only high hardness and corrosion resistance are required , It is also required to have a low coefficient of friction, good high temperature stability, etc. In order to meet the increasingly complex and diver...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/06C23C14/35B82Y40/00
CPCB82Y40/00C23C14/067C23C14/345C23C14/352
Inventor 代伟高翔王启民
Owner GUANGDONG UNIV OF TECH
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