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Flat response composite filter and manufacturing method thereof

A composite filter and filter technology, which is applied in the field of soft X-ray radiation flow quantitative measurement, can solve the problems affecting the composite filter yield and response performance, high requirements for experimental calibration and use, and affecting the accuracy of radiation flow measurement. Achieve the effect of excellent surface flatness, high yield and low uniformity

Inactive Publication Date: 2017-09-29
LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

Although the traditional flat response filter can meet the research needs, it has the following disadvantages: (1) The requirements for experimental calibration and use are extremely high
The calibration of the traditional flat-response composite filter requires the use of a vertical slit to limit the light, which requires uniform light source, fixed spot size, and high consistency with the calibration conditions during use. Therefore, there are huge gaps in the calibration and use of traditional composite filters (2) Flatness and uniformity of the filter surface: Wrinkles and thin golden trachoma exist in the process of preparing self-supporting composite filter by micro-electroforming process, which seriously affects the yield and response performance of the composite filter. And lead to inaccurate calibration data, thus affecting the accuracy of radiation flow measurement

Method used

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  • Flat response composite filter and manufacturing method thereof
  • Flat response composite filter and manufacturing method thereof
  • Flat response composite filter and manufacturing method thereof

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preparation example Construction

[0059] The preparation method of the flat response composite filter of the present invention is simple in process. The second gold layer 2 with a specific porous structure is prepared on one surface of the first gold layer 1, and a composite gold layer with a certain area ratio can be obtained. The composite filter has high yield and excellent surface smoothness, which can effectively complete the quantitative measurement of soft X-ray radiation flow in the field of inertial confinement fusion, such as black cavity physics, radiation transport, radiation ablation, radiation opacity, and implosion dynamics.

[0060] In a preferred embodiment of the present invention, the thickness of the first gold layer 1 is 45-55 nm, preferably 48-52 nm, and more preferably 50 nm.

[0061] In a preferred embodiment of the present invention, the thickness of the second gold layer 2 is 370-390 nm, preferably 375-385 nm, and more preferably 380 nm.

[0062] In a preferred embodiment of the present inve...

Embodiment 1

[0103] A method for preparing a flat response composite filter includes the following steps:

[0104] (1) Preparation of the first gold layer: heat the substrate silicon wafer at 140°C for 10 minutes, then spin-coat a polyimide corrosion barrier layer of about 1.5 μm thick and perform imidization treatment according to the set time and temperature ( The imidization is carried out by conventional heat treatment methods, specifically heat treatment at 85°C for 1 hour, heat treatment at 135°C for 1 hour, heat treatment at 185°C for 1 hour, heat treatment at 270°C for 4-6 hours, and natural cooling to room temperature). Magnetron sputtering deposition of 45nm thick gold on the imine film to obtain the first gold layer;

[0105] (2) Preparation of the second gold layer: spin-coated AZ5214 photoresist (produced by Changsha Jinxin Electronic Materials Co., Ltd.) with a thickness of about 1.4μm, heated at 80°C for 1 min, under the cover of a template with a preset pattern UV exposure was ...

Embodiment 2

[0108] A method for preparing a flat response composite filter includes the following steps:

[0109] (1) Preparation of the first gold layer: heat the substrate silicon wafer at 160°C for 20 minutes, and then spin-coat a 2μm thick polyimide corrosion barrier layer and perform imidization treatment according to the set time and temperature (using The conventional heat treatment method is used for imidization, specifically, heat treatment at 85°C for 1 hour, heat treatment at 135°C for 1 hour, heat treatment at 185°C for 1 hour, heat treatment at 270°C for 4-6 hours, and natural cooling to room temperature), in polyimide Depositing 55nm thick gold on the amine film by magnetron sputtering to obtain the first gold layer;

[0110] (2) Preparation of the second gold layer: spin-coated AZ5214 photoresist (produced by Changsha Jinxin Electronic Materials Co., Ltd.) with a thickness of about 1.8μm, heated at 100°C for 3 minutes, under the cover of a template with a preset pattern UV expo...

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Abstract

The invention provides a flat response composite filter and a manufacturing method thereof. The manufacturing method of the flat response composite filter is simple; by preparing a second gold layer with a specific porous structure on one side surface of a first gold layer, a composite gold layer with certain area ratio can be obtained; and the flat response composite filter is high in yield, excellent in surface flatness, uniform in structure and high in effective area, can effectively reduce the requirements for uniformity, size and position of a calibration light source, can randomly limit a hole in an experiment to prevent signal saturation and effectively improve the accuracy of calibration data and the precision of radiant flux measurement, and can effectively complete soft X-ray radiant flux quantitative measurement of black cavity physics, radiation transport, radiation ablation, radiation opacity and implosion dynamics in the inertial confinement fusion field.

Description

Technical field [0001] The invention relates to the technical field of quantitative measurement of soft X-ray radiation flow, in particular to a flat response composite filter and a preparation method thereof. Background technique [0002] In the field of inertial confinement fusion, black cavity physics, radiation transport, radiation ablation, radiation opacity, and implosion dynamics all require quantitative measurements of soft X-ray radiation flow. At present, the commonly used quantitative measurement of X-ray radiation flow in the energy range of 0.1keV-4.0keV generally uses X-ray flat response XRD detectors. As the main component of the flat response composite filter, the composite filter with different area ratios is generally realized by seamless splicing or nesting of large and small loops. Although the traditional flat response filter can meet the research needs, it has the following shortcomings: (1) The experimental calibration and use requirements are extremely hi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01T1/29C23C28/02
CPCC23C28/023G01T1/29
Inventor 车兴森侯立飞张颖娟杜华冰杨轶濛李志超杨国洪
Owner LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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