High-density boundary double-layer molybdenum disulfide nano sheet and preparation method thereof
A molybdenum disulfide, high-density technology, applied in the field of nanomaterials, can solve the problems of reducing catalytic efficiency and affecting the conductivity of molybdenum disulfide, and achieve the effect of less process flow, good electrical conductivity, and high-density boundary
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Embodiment 1
[0041] Such as figure 1 As shown, it is a flow chart of a method for growing high-density boundary double-layer molybdenum disulfide nanosheets on a glass slide according to an embodiment of the present invention. figure 2 Schematic diagram of the preparation method. The preparation method of described high-density boundary double-layer molybdenum disulfide nanosheets comprises:
[0042] In order to achieve the above purpose, an embodiment of the present invention provides a method for growing high-density border double-layer molybdenum disulfide nanosheets on a glass slide, comprising the following steps:
[0043] Step 101, pretreatment of the substrate;
[0044] Step 102, cleaning of the substrate;
[0045] Step 103, drying of the substrate;
[0046] Step 104, growing pyramidal molybdenum disulfide on the substrate by chemical vapor deposition;
[0047] In said step 101: the commercial slides are cut into small pieces of 2.5 cm in length and 1.5 cm in width, and then s...
Embodiment 2
[0065] In this embodiment, the mass concentration of hydrofluoric acid in step 101 is 35%, and the cleaning time is 5 minutes.
[0066] In step 104, the temperature control of the three temperature zones during the growth process is as follows: increase from 30°C to 300°C after 13 minutes, keep it for 10 minutes, then raise the temperature to 1200°C after 12 minutes and keep it for 2 minutes, then cool down to 650°C after 3 minutes And open the tube furnace to cool down quickly.
[0067] During the growth process, the air flow is regulated as follows: the air flow is always 20 sccm before the furnace is turned on for rapid cooling, and it is 150 sccm after the furnace is turned on.
Embodiment 3
[0069] In this embodiment, the mass concentration of hydrofluoric acid in step 101 is 30%, and the cleaning time is 10 minutes.
[0070] In step 104, the temperature control of the three temperature zones during the growth process is as follows: increase from 30°C to 300°C after 5 minutes, hold for 5 minutes, then raise the temperature to 800°C after 10 minutes and hold for 8 minutes, cool down to 750°C after 6 minutes and open The tube furnace cools down quickly.
[0071] During the growth process, the air flow is regulated as follows: the air flow is always 30 sccm before the furnace is turned on for rapid cooling, and is 250 sccm after the furnace is turned on.
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