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Preparation method of internal heating evaporation basket with aluminum liquid corrosion resistant composite ceramic coating

A composite ceramic, internal heating technology, applied in coating, metal material coating process, melting spray plating, etc., can solve the problems of poor thermal conductivity, thermal brittleness sensitivity, easy cracking, etc., to achieve low porosity and prolong service life. , the effect of reducing manufacturing production costs

Active Publication Date: 2019-11-12
FUZHOU UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In addition, the high-temperature aluminum melt is very active in vacuum, and it is easy to generate splashes, overflow the crucible and alloy the metal wire
Generally speaking, although a single alumina ceramic material has high temperature resistance and high corrosion resistance, it is sensitive to thermal brittleness and is easy to crack; although a single zirconia ceramic material is highly inert, its thermal conductivity is poor

Method used

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  • Preparation method of internal heating evaporation basket with aluminum liquid corrosion resistant composite ceramic coating
  • Preparation method of internal heating evaporation basket with aluminum liquid corrosion resistant composite ceramic coating
  • Preparation method of internal heating evaporation basket with aluminum liquid corrosion resistant composite ceramic coating

Examples

Experimental program
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Effect test

Embodiment 1

[0029] Prepared by atmospheric plasma spraying technology with Al 2 o 3 -8YSZ internal heating evaporation basket for corrosion-resistant coating, including the following steps:

[0030] (1) Machining: Use high-purity tungsten wire with a length of 10cm and a wire diameter of 1mm to wind a top diameter of 15mm and a height of 15mm to form a single-strand conical filamentary evaporation basket as the base material ( figure 2 );

[0031] (2) Substrate surface treatment: The surface of the tungsten wire evaporation basket to be sprayed is roughly ground with silicon carbide sandpaper, then immersed in 60g / L NaOH solution for 0.5h for degreasing treatment, and the surface coating treatment is carried out on the parts not to be sprayed, and finally Then carry out coarsening treatment, mainly using GP-1 dry sandblasting machine produced by Beijing Changkong Sandblasting Equipment Co., Ltd., the sandblasting material is 20 mesh brown corundum sand, the process parameters are sandb...

Embodiment 2

[0037] (1) Machining: Use high-purity tungsten wire with a length of 10cm and a wire diameter of 1mm to wind a top diameter of 15mm and a height of 15mm to form a single-strand conical filamentary evaporation basket as the base material ( figure 2 );

[0038] (2) Substrate surface treatment: The surface of the tungsten wire evaporation basket to be sprayed is roughly ground with silicon carbide sandpaper, then immersed in 60g / L NaOH solution for 0.5h for degreasing treatment, and the surface coating treatment is carried out on the parts not to be sprayed, and finally Then carry out coarsening treatment, mainly using GP-1 dry sandblasting machine produced by Beijing Changkong Sandblasting Equipment Co., Ltd., the sandblasting material is 20 mesh brown corundum sand, the process parameters are sandblasting air pressure 0.7Mpa, and the spray angle is 75~ 90°, the spray distance is 120mm, the purpose is to enhance the mechanical combination of the spray powder and the substrate; ...

Embodiment 3

[0044] (1) Machining: Use high-purity tungsten wire with a length of 10cm and a wire diameter of 1mm to wind a top diameter of 15mm and a height of 15mm to form a single-strand conical filamentary evaporation basket as the base material ( figure 2 );

[0045] (2) Substrate surface treatment: The surface of the tungsten wire evaporation basket to be sprayed is roughly ground with silicon carbide sandpaper, then immersed in 60g / L NaOH solution for 0.5h for degreasing treatment, and the surface coating treatment is carried out on the parts not to be sprayed, and finally Then carry out coarsening treatment, mainly using GP-1 dry sandblasting machine produced by Beijing Changkong Sandblasting Equipment Co., Ltd., the sandblasting material is 20 mesh brown corundum sand, the process parameters are sandblasting air pressure 0.7Mpa, and the spray angle is 75~ 90°, the spray distance is 120mm, the purpose is to enhance the mechanical combination of the spray powder and the substrate; ...

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Abstract

The invention discloses a preparation method of an internal heating evaporation basket with an aluminum-liquid-corrosion-resistant composite ceramic coating and belongs to the technical field of vacuum coating. 0.8-1.5 mm of the Al2O3-8YSZ erosion-resistant coating of a composite structure is prepared on the surface of the tungsten filament evaporation basket in a sprayed mode through the thermalspraying technique. Aluminum oxide and yttria-stabilized zirconia powder are weighed and mixed with the percentage of Al2O3 to 8YSZ being 10-55wt%:45-90wt%, and then are subjected to ball milling anddried to serve as a spraying material. In the spraying material, through doping of Al2O3, the strengthening and toughening effects on YSZ are achieved, the YSZ is not likably to crack, and the dense and low-porosity Al2O3 / 8YSZ spraying coating is formed; excellent corrosion resistance and high-temperature mechanical properties are achieved, and the service life of the tungsten filament evaporationbasket containing molten metal can be significantly prolonged; and the tungsten filament evaporation basket as an internal heating type crucible can be permanently and widely applied to the technicalfield of vacuum metal film vapor deposition, and very important engineering application value is achieved.

Description

technical field [0001] The invention relates to the technical field of vacuum coating, in particular to a method for preparing an internally heated evaporation basket with an aluminum liquid corrosion-resistant composite ceramic coating. Background technique [0002] Resistance heating evaporation source is widely used in the field of vacuum coating because of its simple structure, convenient installation and low price. It is often used in vacuum evaporation packaging materials, capacitor metallization coating, display Plating and aluminum plating of paper and textiles, etc., the main evaporation film materials are aluminum wire, copper, silver, gold, etc. As a device for containing low-melting metal film materials (such as aluminum wire, aluminum sheet, aluminum particles, copper wire, silver wire, etc.), it has high temperature resistance, metal melt corrosion resistance, and conducts heat under high vacuum conditions. , which mainly melts, evaporates and deposits the fil...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C4/11C23C4/134C23C4/129
CPCC23C4/11C23C4/129C23C4/134
Inventor 李强郑钦龙何柯
Owner FUZHOU UNIV