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A method for increasing binding force between a fullerene-like carbon film and a steel substrate

A fullerene carbon film and enhancement technology, applied in the field of plasma nitriding, can solve the problems of inability to combine ion nitriding and coating, achieve good chemical inertness, strengthen surface technology, and improve binding force

Inactive Publication Date: 2018-06-15
LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] At present, the temperature of low-temperature plasma nitriding is between 400-600°C, and the equipment cannot effectively combine ion nitriding and coating (patent ZL201310233825.3)

Method used

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  • A method for increasing binding force between a fullerene-like carbon film and a steel substrate

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Experimental program
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Effect test

Embodiment 1

[0025] First, select three stainless steel sheets with a smooth surface, pre-clean them with dilute hydrochloric acid solution, wait for them to dry, then put them into acetone and ethanol for ultrasonic cleaning for 30 minutes each, take out the stainless steel sheets, dry them with ear washing balls, and then quickly transfer them to On the base of the vacuum chamber, start vacuuming. Secondly, wait for the vacuum to be less than 2.0×10 -3 At Pa, argon gas (100 SCCM) was introduced, and the pressure was adjusted to about 20 Pa. Under the condition of pulse bias of -400 V and duty cycle of 50%, plasma cleaning was performed for 30 minutes. After cleaning, nitrogen gas (40 SCCM) was introduced, and the pressure was adjusted to about 30 Pa. Low-temperature plasma nitriding was carried out under the conditions of pulse bias -500 V and duty cycle 50%, and the nitriding time was 2 hours. Finally, a fullerene-like carbon film is deposited on the surface of the treated steel subst...

Embodiment 2

[0027] First, six stainless steel sheets with smooth surface are selected, three of which have been treated with low-temperature plasma nitriding, and the other three have not been treated with low-temperature plasma nitriding. Carbon films were then deposited on the surfaces of the six steel substrates. as figure 1 As shown, the binding force between the steel substrate and the fullerene-like carbon film after low-temperature plasma nitriding treatment can reach about 70N, while the binding force between the steel substrate and the fullerene-like carbon film without low-temperature plasma nitriding treatment is only 10N about. Repeat the experiment three times to ensure the accuracy of the experimental results. It shows that the low-temperature plasma nitriding method can greatly improve the bonding force between the steel substrate and the fullerene-like carbon film, and the bonding force can be increased by 600%.

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Abstract

A method for increasing binding force between a fullerene-like carbon film and a steel substrate is disclosed. Low-temperature plasma nitriding is performed on a substrate under combined actions of aradio-frequency power supply and a pulse minus bias by adopting a plasma enhanced chemical vapor deposition technique and a low-temperature plasma nitriding technique, adopting a stainless steel sheetas the substrate, and adopting argon and nitrogen as gas sources. The method is characterized in that the method is simple in process, economical, efficient, low in nitriding temperature and good inrepeatability, and the binding force between the fullerene-like carbon film and the steel substrate is obviously increased. By adoption of the method, a situation that the fullerene-like carbon film falls under high-strength working conditions so that the fullerene-like carbon film on the steel substrate cannot achieve a lubricating effect is avoided. The method is suitable for stainless steel surfaces, is also suitable for the fields of cast iron, alloys, ceramics, polymer materials, and other materials, and has a wide application prospect, and therefore the method has a great application potential.

Description

technical field [0001] The invention belongs to the field of low-temperature plasma nitriding, and relates to a method for enhancing the binding force between a fullerene-like carbon film and a steel substrate. Background technique [0002] With the rapid growth of the world economy, the problem of energy crisis is becoming more and more serious, and the losses caused by friction and wear also increase accordingly. According to statistics, friction consumes 1 / 3 of the world's disposable energy, and about 60% of parts fail due to various forms of wear. The economic losses caused by friction and wear in my country reach trillions of yuan every year. High-tech technologies such as aviation, aerospace, and nuclear energy urgently require the use of high-temperature-resistant, wear-resistant, and low-friction solid lubricating films to protect the surfaces of metal parts under high-strength working conditions, and increase the number of key components in aviation, aerospace, an...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/26C23C16/517C23C16/02C23C8/38
CPCC23C16/26C23C8/38C23C16/02C23C16/517
Inventor 张俊彦王彦王永富高凯雄
Owner LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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