A kind of aluminum oxide polishing solution for sapphire polishing and preparation method thereof

Abstract

The invention provides aluminum oxide polishing solution used for polishing sapphire. The aluminum oxide polishing solution is aqueous solution comprising the following components: 12-26wt% of alpha-aluminum oxide powder with the particle size of 80-350nm, 0.5-1.2wt% of a dispersing agent, 0.04-1.2wt% of a lubricating agent, 0.05-0.7wt% of a complexing agent, 0.08-0.4wt% of a preservative and 2.4-5wt% of a pH value regulator, wherein the dispersing agent is one or more than one of poly vinyl alcohol, polyvinylpyrrolidone, alkylphenol polyoxyethylene and fatty alcohol polyoxyethylene ether, thelubricating agent is one or more than one of polyethylene glycol 400, polyethylene glycol 600 and glycerin, the complexing agent is one or more than one of sodium gluconate, sodium lactate and potassium citrate, and the preservative is one or more than one of benzotriazole, potassium borate and sodium borate. The polishing solution provided by the invention has high polishing efficiency in a sapphire processing process, lubricating effect is excellent, a processed product surface is good in quality, and the polishing solution is simple in preparation method, low in cost and beneficial to industrial popularization and application.

Description

technical field [0001] The invention relates to the technical field of sapphire polishing, in particular to an alumina polishing liquid for sapphire polishing and a preparation method thereof. Background technique [0002] Sapphire, also known as white gemstone, has the molecular formula Al 2 o 3 , is a multifunctional oxide crystal with a hexagonal crystal structure and a Mohs hardness of 9, second only to diamond. It has excellent optical, physical and chemical properties. Compared with natural gemstones, it has the characteristics of high hardness, high melting point, good light transmission, excellent thermal conductivity and electrical insulation, good mechanical and mechanical properties, good wear resistance, and stable corrosion resistance. , national defense and other fields have a wide range of applications. [0003] With the continuous development of science and technology, the sapphire workpiece must have a high surface quality, so the requirements for the sur...

AI Technical Summary

Problems solved by technology

[0010] The object of the present invention is to provide a kind of aluminum oxide polishing solution for sapphire polishing, to solve the ubiquitous problems of low polishing efficiency and yield rate, high wafer surface roughness, and excessive loss of auxiliary materials in the process of processing sapphire workpieces without reducing the polishing speed. technical issues

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