Resist composition with good hole shielding function capable of depicting exposure images
A technology of resist and composition, applied in photosensitive materials for optomechanical equipment, optics, optomechanical equipment, etc., can solve the problem of poor film mechanical strength, poor hole-masking performance, and reduced resist thickness, etc. problems, achieve the effects of improving flexibility, excellent photosensitivity, and improving the hole-masking performance of the film layer
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Synthetic example
[0064] Compound shown in synthetic general formula (I):
[0065] Add 1mol of phthalic anhydride, 0.20mol of butanol, 4.44g of p-toluenesulfonic acid into the reactor, 100mL of xylene, install a thermometer, water separator and reflux condenser, stir and heat to reflux for 2.5h. Then add 1mol ethylene glycol, continue to reflux for 4h. Next, at the reflux temperature, a mixed solution of 1.05 mol of acrylic acid and 0.02 mol of thiaphenazine was added dropwise to the reactor for about 2 hours. After the dropwise addition was completed, the mixture was kept for 5 hours. Then cool down to 40°C, extract with about 150mL of 5% mass fraction of sodium hydroxide, remove the water phase, then extract and wash the organic phase with 150mL of water for 2 to 3 times, dry the organic phase with sodium carbonate, filter, and add 0.107g of p-hydroxybenzene Methyl ether, xylene was distilled off under reduced pressure, and the residue was the compound (I-1) of general structural formula (I)...
Embodiment 1-5、 comparative example 1-2
[0073] Examples 1-5 and Comparative Examples 1-2 respectively provide a resist composition, the specific formulation of which is shown in Table 1.
[0074] Table 1: Resist composition formula table of different embodiments and comparative examples
[0075]
[0076] Remark:
[0077] 1. Alkali-soluble copolymer resin A-1~A-3
[0078] A-1: Methacrylic acid / methyl methacrylate / hydroxyethyl methacrylate / styrene=17 / 72 / 6 / 5, weight average molecular weight 82,000, solid content 40%, acid value 110.1mgKOH / g dry resin. (The dry resin represents the resin after deducting the solvent, the same applies hereinafter).
[0079] A-2: Methacrylic acid / methyl methacrylate / hydroxyethyl methacrylate / styrene=23 / 59 / 6 / 12, weight average molecular weight 97,000, solid content 40%, acid value 150mgKOH / g dry resin.
[0080] A-2: Methacrylic acid / methyl methacrylate / butyl acrylate / hydroxyethyl methacrylate / styrene=30 / 34 / 10 / 6 / 20, the weight average molecular weight is 127,000, and the solid conte...
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