Extra-thick hydrogen-free diamond-like film and preparation method thereof

A diamond film, ultra-thick technology, applied in metal material coating process, ion implantation plating, coating and other directions, can solve problems such as poor bonding force, easy peeling of the film layer, film wear, etc., to enhance wear resistance. , to expand the scope of application, the effect of good application prospects

Pending Publication Date: 2018-08-17
大连威钛克纳米科技有限公司
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Problems solved by technology

[0003] The sliding parts of automobile engines and transmission systems generally use fuel oil or engine oil to achieve the lubrication function. However, the combination of hydrogen-containing diamond-like carbon film and engine oil is not ideal in terms of the sustainability of the friction reduction effect, mainly due to the C-H bond in the diamond-like film. Carbon reacts with

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  • Extra-thick hydrogen-free diamond-like film and preparation method thereof

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preparation example Construction

[0023] A method for preparing an ultra-thick hydrogen-free diamond-like film coating, comprising the following steps:

[0024] (1) Workpiece pretreatment. Grinding and polishing the workpiece, the surface roughness of the workpiece after grinding and polishing is Ra<0.1 μm, then the workpiece is ultrasonically cleaned with pure water and alcohol, and finally the workpiece is dried and placed on the turret of the vacuum ion plating furnace cavity;

[0025] (2) Ion cleaning. After vacuuming, the air pressure in the vacuum chamber is lower than 8×10 -4 After Pa, start the substrate turret, control the speed at 2~4rpm, pass in argon gas for argon ion glow cleaning, then reduce the flow rate of argon gas, turn on the Cr metal target, perform metal ion etching cleaning on the workpiece, and argon ion glow cleaning. The photodischarge cleaning conditions are as follows: air pressure is 2~4 Pa, substrate temperature is 300~400°C, substrate bias voltage is -800~-1000 V, duty cycle is...

Embodiment 1

[0030] Grind and polish the ball-milled cast iron piston ring workpiece to a roughness of Ra=80nm, first clean it with pure water and alcohol for 20 minutes, then dry it and place it on the turret of the vacuum ion plating furnace chamber, install a part of the elemental Cr on the arc target position Target, a part of the installation of high-purity graphite target, close the door of the vacuum chamber. Turn on the mechanical pump, Roots pump and molecular pump in turn to pump the vacuum chamber to 5×10 -4Pa, argon gas was introduced to 2.0Pa, the substrate temperature was heated to 350°C, a negative bias voltage of -1000V was applied to trigger glow discharge, and argon ion sputtering was performed for 20 minutes to clean. After glow cleaning, adjust the argon flow, control the vacuum chamber pressure at 0.3Pa, set the substrate bias to -900V, and the duty cycle to 40%, turn on the metal Cr target, and set the arc current of the target to 80A for metal ion engraving. etch cl...

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Abstract

The invention discloses an extra-thick hydrogen-free diamond-like film and a preparation method thereof. The upper portion of a metal substrate is coated with a Cr adhesive layer, a C/C multilayer composite film is arranged on the upper portion of the Cr adhesive layer, and soft C films and hard C films are alternately deposited to form the C/C multilayer composite film. The preparation method includes the steps: (1) workpiece pretreatment; (2) ion cleaning; (3) Cr adhesive layer preparation; (4) C/C multilayer composite film preparation. The soft and hard alternate C/C multilayer film is prepared by controlling substrate bias voltage through a vacuum ion plating technology, all layer interfaces are matched with each other, the film has good binding force and tenacity, SP2 bonds in the film are transformed into SP3 bonds by inductive effects generated by ion bombardment under high bias voltage, and the abrasion resistance of the diamond-like film is enhanced. According to a homogeneousmultilayer structure, the hardness of the film reaches up to 40GPa, friction coefficient is lower than 0.15, and the film has good durability, so that the engineered application range of the diamond-like film is widened.

Description

technical field [0001] The invention relates to the technical field of material surface modification, in particular to an ultra-thick hydrogen-free diamond-like carbon film material prepared by a vacuum ion plating method. Background technique [0002] In order to reduce the fuel consumption of the engine, it is very important to reduce the friction of the sliding parts of the engine, especially the key components such as pistons and piston rings. For example, the piston ring group contributes up to 25% to reduce the total mechanical friction. When considering measures to optimize the tribological system of piston rings and cylinder surfaces, piston ring coatings play a pivotal role. As a high-hardness anti-friction and anti-wear surface protection film material, diamond-like film has excellent wear resistance, low friction coefficient and good synergistic compounding characteristics with engine lubricating oil. It is an important surface treatment technology for engine ener...

Claims

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Application Information

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IPC IPC(8): C23C14/32C23C14/06C23C14/02
CPCC23C14/022C23C14/025C23C14/0605C23C14/32
Inventor 张林张朝奎王明磊
Owner 大连威钛克纳米科技有限公司
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