Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

A kind of preparation method of metal/nonmetal composite film with superhydrophobic property

A composite thin film, non-metallic technology, applied in metal material coating process, vacuum evaporation plating, coating, etc., can solve the problems of expensive graphene, cumbersome and complicated steps, and unfavorable widespread promotion, and achieve material safety and non-toxicity , friendly process and environment, and convenient equipment operation

Active Publication Date: 2020-03-17
XI AN JIAOTONG UNIV
View PDF10 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Its steps are cumbersome and complicated, requiring high temperature treatment, low efficiency, and the preparation process contains a variety of toxic and harmful organic reagents
In addition, graphene is expensive, which is not conducive to the widespread promotion of this method

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • A kind of preparation method of metal/nonmetal composite film with superhydrophobic property
  • A kind of preparation method of metal/nonmetal composite film with superhydrophobic property
  • A kind of preparation method of metal/nonmetal composite film with superhydrophobic property

Examples

Experimental program
Comparison scheme
Effect test

preparation example Construction

[0029] The preparation method of the metal / nonmetal composite film with superhydrophobic properties of the present invention comprises the following steps:

[0030] 1) Perform ultrasonic cleaning and drying on the substrate made of single crystal silicon, quartz, silicon oxide, stainless steel or sapphire, then clamp it on the sample tray and send it into the sputtering chamber.

[0031] 2) Copper, silver, gold, aluminum or titanium metal target and aluminum oxide, zinc oxide, silicon oxide, zirconium oxide, hafnium oxide, or aluminum nitride, titanium nitride, silicon nitride, zirconium nitride, or carbonized Non-metallic targets such as silicon, titanium carbide or tungsten carbide are installed on a target position with an unbalanced magnetic field, and the sputtering chamber is pumped to a predetermined background vacuum.

[0032] 3) Using high-purity argon as the working gas, the working pressure is 0.1-0.3Pa, and the bias voltage is -80--100V; at a predetermined temperat...

Embodiment 1

[0038] al 2 o 3 Preparation of / Cu superhydrophobic composite film: use single crystal silicon as the substrate, after ultrasonic cleaning and drying, the substrate is clamped on the sample tray and sent into the sputtering chamber. Install the copper target and the alumina target on the unbalanced magnetron target respectively, and pump the background vacuum of the sputtering chamber to 2×10 -4Pa, the substrate temperature rises to 450°C, and the power ratio between the non-metallic target and the metal target is controlled to be 3:1, and then the coating operation starts. Turn on the rotation switch of the sample disc to make it rotate at a speed of 10 degrees per second, pass in Ar gas and keep the working pressure at 0.1Pa, and use radio frequency power to co-sputter the copper target and the alumina target, the copper target and the oxide The powers of the aluminum targets were 40W and 120W respectively, and a negative bias of -80V was applied during the sputtering proc...

Embodiment 2

[0041] Preparation of ZnO / Ag super-hydrophobic composite film: use quartz as the substrate, after ultrasonic cleaning and drying, clamp the substrate on the sample tray and send it into the sputtering chamber. Install the silver target and the zinc oxide target on the unbalanced magnetron target respectively, and pump the background vacuum of the sputtering chamber to 2×10 -4 Pa, the substrate temperature rises to 150°C, and the power ratio between the non-metallic target and the metal target is controlled to be 1.25:1, and then the coating operation starts. Turn on the autorotation switch of the sample plate to make it rotate at a speed of 10 degrees per second, pass in Ar gas and keep the working pressure at 0.3Pa, use radio frequency power to co-sputter the silver target and zinc oxide target, the silver target and the oxide The power of the zinc target was 36W and 45W respectively, and a negative bias of -100V was applied during the sputtering process, and the sputtering w...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

PropertyMeasurementUnit
thicknessaaaaaaaaaa
thicknessaaaaaaaaaa
angleaaaaaaaaaa
Login to View More

Abstract

The invention discloses a preparing method for a metal / nonmetal composite film with super-hydrophobicity. According to the method, a substrate is subjected to ultrasonic cleaning and drying treatment,the metal / nonmetal composite structure film is prepared by a magnetic control co-sputtering technology, and a special surface nanostructure is obtained by a certain nonmetal target / metal target powerratio and deposition temperature, so that the super-hydrophobicity is realized. The preparing method for the metal / nonmetal composite film with the super-hydrophobicity is environmentally friendly inprocess, and simple and practicable without the need of a template, and has no special requirements on the substrate, the composite film with the excellent hydrophobicity and strong film-substrate binding force can be obtained by one step, the preparing method has the better application potential and prospect in the fields such as self-cleaning materials, biomaterials, microfluid devices and corrosion resistance, and a new technical thought is provided for the industrial application of the super-hydrophobic films.

Description

technical field [0001] The invention belongs to the technical field of superhydrophobic film materials, in particular to a metal / nonmetal composite film with superhydrophobic properties and a preparation method thereof. The prepared material can be used in fields such as self-cleaning materials, biological materials, microfluidic devices, and anti-corrosion . Background technique [0002] Thin film materials with superhydrophobic properties are widely used in self-cleaning materials, biomaterials, microfluidic devices, anti-corrosion and other fields, which are defined as materials with a contact angle greater than 150° and a rolling angle less than 10° when in contact with water surface. There are many super-hydrophobic materials in nature, such as the surface of lotus leaves and the wings of dragonflies, which all have super-hydrophobic properties on the surface. At present, research on superhydrophobic materials is mainly focused on the following two aspects: one is to ...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/35C23C14/06
CPCC23C14/0688C23C14/352
Inventor 宋忠孝高磊雯杜晓晔薛佳伟李雁淮马飞
Owner XI AN JIAOTONG UNIV
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com