Post-positioned light splitting pupil differential confocal Raman and LIBS spectrum microscopic imaging method and device

Abstract

The invention discloses a post-positioned light splitting pupil differential confocal Raman and LIBS spectrum microscopic imaging method and device, and belongs to the technical field of confocal microscopic imaging, spectrum imaging measurement. A post-positioned light splitting pupil differential confocal microscopic imaging technology is combined with Raman and LIBS spectrum detection technology; a tiny focusing facula of a post-positioned light splitting pupil confocal microscope processed by a superresolution technology is used for performing high spatial resolution morphological imagingon a sample; a spectrum detection system is used for motivating spectrum (Raman spectrum, LIBS spectrum) for a focusing spot to perform microdomain spectrum detection; complementary advantages and structure fusion of laser multispectral detection are used for achieving high spatial resolution and high sensitivity imaging and detection of microdomain complete component information and morphologicalparameter of the sample. According to the method and device provided by the invention, the brand new effective technical approach can be provided for morphological imaging and material component detection in the fields of biomedicine, material science, mineral products and micro and nano-fabrication.

Description

technical field [0001] The invention belongs to the field of confocal microscopic imaging technology and spectral imaging technology, and combines rear split pupil differential confocal micro imaging technology, Raman spectral imaging technology and laser induced breakdown spectral imaging technology, and relates to a rear split pupil differential Confocal Raman and LIBS spectral microscopy imaging methods and devices have broad application prospects in the fields of biomedicine, material science, physical chemistry, minerals, and micro-nano manufacturing. Background technique [0002] Laser-induced breakdown spectroscopy focuses the intense pulsed laser on the surface of the sample to ionize the sample, which can excite the sample to generate plasma. By detecting the spectrum radiated by the decay of plasma energy, the composition information of the sample’s atoms and small molecular elements can be obtained; using laser Raman spectroscopy can measure the molecular excitati...

AI Technical Summary

Problems solved by technology

[0004] 1) Due to the use of simple laser focusing to desorb and ionize the sample, there are still problems such as large laser focusing spot and low detection spatial resolution;

[0005] 2) The time required for Raman spectroscopy imaging is long, and the axial position of the focused spot often drifts relative to the sample to be measured;

[0006] 3) It is impossible to measure the micro-domain morphology and complex components of the sample in situ, which restricts the accurate and complete acquisition of sample micro-domain information

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