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Intelligent selective sunlight transmission and reflection coating and preparation method thereof

A reflective coating and selective technology, applied in the coating, metal material coating process, sputtering coating and other directions, can solve the problems of decreased sunlight regulation rate, unfavorable comprehensive performance, increased cost, etc., to improve visible light transmission. The effect of increasing the rate of solar radiation, improving the rate of sunlight regulation, and improving the wear resistance and weather resistance

Active Publication Date: 2021-04-20
NANJING TECH UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Current reported VO 2 The anti-reflection layer in the coating only has a single function, such as increasing the visible light transmittance, which will lead to a decrease in the solar light regulation rate, and also needs to add a protective layer on the outer surface. The process is complicated, which increases the cost and is not conducive to comprehensive performance optimization

Method used

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  • Intelligent selective sunlight transmission and reflection coating and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0036] The background vacuum is 3.0×10 －5 Pa, the working pressure is 1.0Pa, high-purity Ar gas is used as the ion source, the flow rate is 20sccm, O 2 and N 2 gas as a reaction gas.

[0037] First, a metal W film with a thickness of 3nm was deposited on the quartz glass, the sputtering power was 200W, as a diffusion barrier layer, and the substrate temperature was room temperature.

[0038] Inner anti-reflection layer TiO 2 (rutile phase) deposition, TiO deposition by RF reactive sputtering 2 Layer, pass the reaction gas O 2 gas, the substrate temperature is 200°C, the sputtering power is 180W, O 2 The partial pressure is 0.15Pa, and the thickness is 10nm.

[0039] Main dimming layer VO 2 -W, VO deposited by RF co-sputtering 2 -W floor, VO 2 Co-sputtering with W double target, the sputtering power is 180W and 180W respectively, the substrate temperature is 200℃, and the layer thickness is controlled at 20nm. The W molar content is 0.3%.

[0040] Outer anti-reflecti...

Embodiment 2

[0043] The background vacuum is 3.0×10 －5 Pa, the working pressure is 1.0Pa, high-purity Ar gas is used as the ion source, the flow rate is 20sccm, O 2 and N 2 gas as a reaction gas.

[0044] First, a metal W film with a thickness of 5nm was deposited on the quartz glass, the sputtering power was 500W, as a diffusion barrier layer, and the substrate temperature was room temperature.

[0045] Inner anti-reflection layer TiO 2 (rutile phase) deposition, TiO deposition by RF reactive sputtering 2 Layer, pass the reaction gas O 2 gas, the substrate temperature is 300°C, the sputtering power is 250W, O 2 The partial pressure is 0.15Pa, and the thickness is 20nm.

[0046] Main dimming layer VO 2 -W, VO deposited by RF co-sputtering 2 -W floor, VO 2 Co-sputtering with W double target, the sputtering power is 250W and 250W respectively, the substrate temperature is 350℃, and the layer thickness is controlled at 30nm. The W molar content is 2%.

[0047] Outer anti-reflection...

Embodiment 3

[0050] The background vacuum is 3.0×10 －5 Pa, the working pressure is 1.0Pa, high-purity Ar gas is used as the ion source, the flow rate is 20sccm, O 2 and N 2 gas as a reaction gas.

[0051] First, a metal W film with a thickness of 8nm was deposited on the quartz glass, the sputtering power was 200W, as a diffusion barrier layer, and the substrate temperature was room temperature.

[0052] Inner anti-reflection layer TiO 2 (rutile phase) deposition, TiO deposition by RF reactive sputtering 2 Layer, pass the reaction gas O 2 gas, the substrate temperature is 300°C, the sputtering power is 250W, O 2 The partial pressure is 0.15Pa, and the thickness is 40nm.

[0053] Main dimming layer VO 2 -W, VO deposited by RF co-sputtering 2 -W floor, VO 2 Co-sputtering with W double target, the sputtering power is 300W and 300W respectively, the substrate temperature is 350℃, and the layer thickness is controlled at 30nm. The W molar content is 2%.

[0054] Outer anti-reflection...

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Abstract

The invention discloses an intelligent selective sunlight transmission and reflection coating and a preparation method thereof, which is characterized in that it consists of a substrate layer, a diffusion barrier layer, an inner anti-reflection layer, a main dimming layer, and an outer anti-reflection layer; Among them, the diffusion barrier layer is metal W film, and the inner anti-reflection layer is rutile phase TiO 2 , the main dimming layer is VO 2 -W, the outer anti-reflection layer is anatase TiO 2 -N; the thicknesses of the diffusion barrier layer, the inner anti-reflection layer, the main light-adjusting layer and the outer anti-reflection layer are 3-8nm, 10-50nm, 20-80nm and 30-60nm respectively. Prepared by multi-target radio frequency reactive sputtering. The present invention designs two different double anti-reflection layers. The outer anti-reflection layer with a gradient structure not only improves the visible light transmittance, promotes the solar light regulation rate, but also has the functions of protective coating and self-cleaning. The invention has the advantages of simple operation, good repeatability, cleanness and no pollution, and good realization effect. This VO-based 2 High-efficiency solar-tunable coatings will be widely used in the field of "smart window" buildings.

Description

technical field [0001] The invention relates to an intelligent selective sunlight transmission and reflection coating and its preparation method, in particular to an intelligent energy-saving composite coating with adjustable near-infrared light and its preparation method, which can be widely used in building "smart windows" . [0002] technical background [0003] my country's building energy consumption accounts for about 26% of the total energy consumption of the society, of which about 50% is due to the low energy-saving effect of building glass. Improving the energy-saving efficiency of glass doors and windows is one of the important ways to reduce building energy consumption. There are three main factors affecting the loss of architectural glass: infrared radiation, permeable solar radiation and heat transfer coefficient. Reducing solar radiation can reduce the heat transfer coefficient at the same time, and the heat transfer can also be reduced by insulating glass. A...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/18C23C14/34C23C14/08C23C14/58
Inventor 操振华
Owner NANJING TECH UNIV
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