Silicon nanowire chip and mass spectrum detection method based on silicon nanowire chip
A silicon nanowire and mass spectrometry detection technology, applied in the field of new materials and mass spectrometry detection and analysis
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[0098] The present invention will be specifically introduced below in conjunction with the accompanying drawings and specific embodiments.
[0099] A silicon nanowire chip, the manufacturing process is as follows:
[0100] Step 1, the surface of the single crystal silicon wafer is washed and pretreated, and then subjected to metal-assisted etching and alkali post-etching to obtain a silicon nanowire chip with a cutting edge;
[0101] The steps of surface cleaning and pretreatment of single crystal silicon wafers are as follows: in a clean room, use a laser or a diamond knife to slice a p-type or n-type crystal plane single crystal silicon wafer to obtain a regular rectangular size, The general size is 20mm×20mm; use concentrated sulfuric acid / hydrogen peroxide mixed solution, acetone, ethanol, isopropanol, deionized water, etc. for ultrasonic cleaning to remove organic matter and dust on the surface of the material.
[0102] The metal-assisted etching step of single crystal ...
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