High temperature resistant interdigitated electrode protected by glass glaze outer surface, its preparation method and application

A technology of interdigitated electrodes and glass glaze, which is applied in the field of interdigitated electrodes for outer surface protection and its preparation, which can solve the problems of decreased sensitivity and detection performance of interdigitated electrodes, decreased performance of interdigitated electrodes, and easy oxidation of metal circuits, etc., to achieve detection The effect of fast speed, high hardness and simple preparation method

Active Publication Date: 2021-12-21
广州钰芯传感科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Generally speaking, the detection of molecules or gases in a high-temperature environment requires interdigitated electrodes to have good high-temperature resistance, but commonly used interdigitated electrodes are usually not able to withstand high-temperature environments. The metal circuit of the interdigitated electrode is easily oxidized, which will cause the performance of the interdigitated electrode to decline or even be scrapped and unusable; in addition, when the interdigitated electrode is used to detect heavy metals in water under high temperature conditions, the accelerated accumulation load of heavy metals will also lead to the sensitivity of the interdigitated electrode. and a drop in detection performance
Therefore, it is very important to carry out surface treatment on the interdigitated electrodes to protect their stable performance in high-temperature environments, and not be affected by complex detection conditions such as external temperatures during use, and to improve their durability. However, currently The surface protection technology of interdigitated electrodes has not been reported yet

Method used

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  • High temperature resistant interdigitated electrode protected by glass glaze outer surface, its preparation method and application
  • High temperature resistant interdigitated electrode protected by glass glaze outer surface, its preparation method and application
  • High temperature resistant interdigitated electrode protected by glass glaze outer surface, its preparation method and application

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0037] Fabrication of Interdigitated Electrodes Containing Glass Glaze on Aluminum Oxide Surface

[0038] (1) Magnetron sputtering Ti / Pt / Au on the surface of alumina ceramic substrate 2, each layer

[0039] (2) The photoresist is suspended on the surface, developed and exposed under a photolithography machine, and an interdigitated electrode pattern is formed.

[0040] (3) After developing, develop in 5 mol / L potassium carbonate solution to form graphics.

[0041] (4) Electroplate a gold layer of about 2 μm on the exposed metal surface. The formula of the gold plating solution is gold citrate solution, 4 g / L in terms of Au, the pH value is between 4.5-6.5, the temperature is between 45-55 °C, and the current density 1.0-1.5ASF, electrodeposition time is 5min.

[0042] (5) Remove photoresist in 2 mol / L potassium hydroxide solution, etch and remove excess gold layer and titanium layer after surface cleaning, to form electrode layer 3 .

[0043] (6) The entire panel is spray...

Embodiment 2

[0047] Fabrication of Interdigitated Electrodes Containing Glass Glaze on Silicon-Based Surfaces

[0048] (1) Magnetron sputtering SiO on the surface of silicon substrate 2 2 / Ti / Pt / Au, per layer

[0049] (2) The photoresist is suspended on the surface, developed and exposed under a photolithography machine, and an interdigitated electrode pattern is formed.

[0050] (3) After developing, develop in 5 mol / L potassium carbonate solution to form graphics.

[0051] (4) Electroplate a gold layer of 1 μm on the bare metal surface, and the formula of the gold plating solution is KAu(CN) 2 The solution is 5g / L in terms of Au, the pH value is between 4.5-6.5, the temperature is between 45-55°C, the current density is 1.0-1.5ASF, and the electrodeposition time is 5min.

[0052] (5) The photoresist is removed in a 5 mol / L potassium hydroxide solution, and after the surface is cleaned, the redundant gold layer and titanium layer are etched away to form the electrode layer 3 .

[00...

Embodiment 3

[0057] Fabrication of Interdigitated Electrodes Containing Glass Glaze on Aluminum Nitride Surfaces

[0058] (1) Magnetron sputtering of Ti-Wu / Pt / Au on the surface of the aluminum nitride ceramic substrate 2, wherein the mass ratio of titanium and tungsten in the titanium-tungsten alloy is 70%:30%.

[0059] (2) The photoresist is suspended on the surface, developed and exposed under a photolithography machine, and an interdigitated electrode pattern is formed.

[0060] (3) After developing, develop in 5 mol / L potassium carbonate solution to form graphics.

[0061] (4) A gold layer of 3 μm is electroplated on the bare metal surface. The formula of the gold plating solution is gold citrate solution, which is 3 g / L in terms of Au, the pH value is between 4.5-6.5, the temperature is between 45-55 °C, and the current density is 1.0 -1.5ASF, electrodeposition time is 5min.

[0062] (5) The photoresist is removed in 4 mol / L potassium hydroxide solution, the surface is cleaned and t...

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PUM

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Abstract

The invention relates to a high temperature resistant interdigital electrode protected by glass glaze outer surface and a preparation method thereof, the electrode comprises a substrate (2), an interdigital electrode layer (3) and an outer surface protection layer (4), the interdigital electrode The layers contain precious metals. The preparation method comprises firstly forming an interdigital electrode layer (3) on a ceramic substrate (2), and then photoetching an interdigital electrode pattern including interdigital electrodes (1) on the surface thereof, and coating the entire board with a micron-sized glass enamel layer , and sintered at a high temperature to form a protective layer, and finally the sintered product is diced and cut to form an interdigitated electrode coated with glass glaze. The interdigitated electrode of the present invention can achieve good air permeability through the external glass enamel protective layer without affecting signal transmission, can be used repeatedly, and improves the service life and stability of the electrode under high temperature conditions.

Description

technical field [0001] The invention relates to the field of chemical detection, in particular to the preparation and application of an interdigital electrode, in particular to an interdigital electrode with outer surface protection and its preparation method and application, belonging to the technical field of compound detection. Background technique [0002] The interdigitated electrode is a commonly used electrochemical detection electrode. The interdigitated electrode is a micro-pitch electrode structure, which is widely used in many fields such as non-destructive testing, electronic communication, and chemical testing. Generally speaking, different application fields have different requirements for the shape, geometric size, processing technology, material selection, modeling analysis, system integration and data analysis of interdigitated electrodes, so we should distinguish between different fields. treat. [0003] Generally speaking, the detection of molecules or ga...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N27/30
CPCG01N27/307
Inventor 奚亚男胡淑锦
Owner 广州钰芯传感科技有限公司
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