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Aluminum nitride ceramic laser machining technology

A technology of aluminum nitride ceramics and laser processing, which is applied in laser welding equipment, metal processing equipment, manufacturing tools, etc. It can solve the problems of affecting cutting quality and difficult to remove slag, and achieves shortening dispersion time, reducing surface tension, and processing simple effect

Pending Publication Date: 2019-12-13
FUJIAN HUAQING ELECTRONICS MATERIAL TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] Therefore, in view of the above content, the present invention provides a laser processing technology for aluminum nitride ceramics, which solves the problem that the slag generated in the laser processing process of aluminum nitride ceramics in the prior art is difficult to remove and affects the cutting quality.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0029] A laser processing technology for aluminum nitride ceramics, characterized in that: comprising the following steps:

[0030] (1): Prepare coating slurry, which includes the following raw materials in parts by weight: 4 parts of phthalocyanine blue BGS, 30 parts of phenolic resin, 3 parts of diethylene glycol butyl ether, 1.2 parts of N,N- Dimethyldodecylamine, 0.6 parts of carboxymethyl cellulose, 0.4 parts of silane coupling agent, 30 parts of water, 9 parts of carbon fiber, 4.5 parts of polyvinyl butyral;

[0031] (2): Clean, degrease and degrease the side of aluminum nitride ceramics to be coated with coating slurry, and then use sandblasting to increase its surface roughness and increase the distance between the surface of aluminum nitride ceramics and the coating slurry Adhesion;

[0032] (3): The coating slurry prepared in step (1) is evenly coated on the surface of aluminum nitride ceramics and dried to form a surface coating with a thickness of 160 μm;

[0033...

Embodiment 2

[0036] A laser processing technology for aluminum nitride ceramics, characterized in that: comprising the following steps:

[0037] (1): Prepare coating slurry, which includes the following raw materials in parts by weight: 6 parts of permanent violet RL, 35 parts of phenolic resin, 2 parts of propylene glycol monomethyl ether, 1.8 parts of polyvinylpyrrolidone, 0.9 parts Polyurethane thickener RM8W, 0.8 parts of silane coupling agent, 50 parts of water, 12 parts of carbon fiber, 6 parts of polyvinyl butyral;

[0038] (2): Clean, degrease and degrease the side of aluminum nitride ceramics to be coated with coating slurry, and then use mechanical surface grinding to increase its surface roughness and increase the distance between the surface of aluminum nitride ceramics and the coating slurry. adhesion;

[0039] (3): The coating slurry prepared in step (1) is evenly coated on the surface of aluminum nitride ceramics and dried to form a surface coating with a thickness of 200 μ...

Embodiment 3

[0043] A laser processing technology for aluminum nitride ceramics, characterized in that: comprising the following steps:

[0044] (1): Prepare coating slurry, which includes the following raw materials in parts by weight: 8 parts of permanent orange G, 25 parts of phenolic resin, 1 part of dodecyl alcohol ester, 1.5 parts of polycarboxylate dispersion agent, 1.2 parts of carboxymethyl cellulose, 0.6 parts of silane coupling agent, 40 parts of water, 15 parts of carbon fiber, 3 parts of polyvinyl butyral;

[0045] (2): Clean, degrease and degrease the side of aluminum nitride ceramics to be coated with coating slurry, and then use plasma technology to increase its surface roughness and increase the distance between the surface of aluminum nitride ceramics and the coating slurry Adhesion;

[0046] (3): The coating slurry prepared in step (1) is evenly coated on the surface of aluminum nitride ceramics and dried to form a surface coating with a thickness of 300 μm;

[0047] (...

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Abstract

The invention relates to the technical field of laser machining, and provides an aluminum nitride ceramic laser machining technology. The problem that in the prior art, molten slag generated in the aluminum nitride ceramic laser machining process is difficult to remove, and the cutting quality is influenced is solved. The aluminum nitride ceramic laser machining technology comprises the followingsteps that (1), coating slurry is prepared; (2), surface treatment is conducted on the face, needing to be coated with the coating slurry, of aluminum nitride ceramic to increase the surface roughnessof the face, and the adhesive force between the aluminum nitride ceramic surface and the coating slurry is increased; (3), the coating slurry prepared in the step (1) is uniformly applied to the aluminum nitride ceramic surface and dried, and a surface coating is formed; (4), the aluminum nitride ceramic dried in the step (3) is subjected to laser cutting, and the laser cutting face is the aluminum nitride ceramic surface coated with the coating slurry; and (5), the aluminum nitride ceramic surface is ground, polished, ultrasonically cleaned and dried, and the residual coating slurry and themolten slag generated in the laser cutting process are removed.

Description

technical field [0001] The invention relates to the technical field of laser processing, in particular to a laser processing technology of aluminum nitride ceramics. Background technique [0002] Aluminum nitride (AlN) ceramics are ceramics with aluminum nitride powder as the main crystal phase. They have high thermal conductivity, low thermal expansion coefficient, electrical properties (dielectric constant, dielectric loss, volume resistivity, dielectric strength) and mechanical properties. With the advantages of excellent performance, non-toxicity, high temperature resistance, and chemical corrosion resistance, it is the best material for heat dissipation substrates and packages of large-scale and ultra-large-scale integrated circuits. [0003] According to the requirements of different sizes and shapes, aluminum nitride ceramics need to be processed. The common ceramic processing methods mainly include: diamond wheel cutting method, diamond scribing method, laser process...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B23K26/38B23K26/70C09D7/40C09D7/61C09D7/65C09D161/06
CPCB23K26/38B23K26/70B23K2103/52C09D7/61C09D7/65C09D7/70C09D161/06C08L29/14C08K7/06
Inventor 杨大胜施纯锡
Owner FUJIAN HUAQING ELECTRONICS MATERIAL TECH
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