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Application of ultrathin silicon nitride nanopore membrane in reverse electrodialysis power generation and device

A technology of reverse electrodialysis and silicon nitride thin film, applied in the direction of generators, generators/motors, electrical components, etc. that convert kinetic energy into electrical energy, can solve the problems of power generation efficiency limited by physical size, etc., and achieve good application prospects , good corrosion resistance, the effect of broadening the scope of application of acid and alkali

Inactive Publication Date: 2019-12-20
SOUTHEAST UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, there are a large number of commercial membranes on the market that can be used for reverse electrodialysis to generate electricity, but the thickness and pore size of most membranes are at the micron level, and the power generation efficiency is limited by the physical size

Method used

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  • Application of ultrathin silicon nitride nanopore membrane in reverse electrodialysis power generation and device
  • Application of ultrathin silicon nitride nanopore membrane in reverse electrodialysis power generation and device
  • Application of ultrathin silicon nitride nanopore membrane in reverse electrodialysis power generation and device

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Embodiment 1

[0024] like figure 1 As shown, the manufacturing method of the ultra-thin silicon nitride nanoporous membrane described in this embodiment is: first, a silicon wafer with a thickness of 300 μm is polished on both sides; 100nm thick silicon nitride film; and then use tetramethyl ammonium hydroxide directional etching to etch a 100×100μm window on the silicon wafer substrate, thus forming a self-supporting silicon nitride film, and then use focused ion beam on the Thinning is carried out on the self-supporting silicon nitride film, the thinning area is 1-5μm circular, the thickness of the thinning area is controlled at 5-20nm, and finally the focused ion beam is used to sputter in the thinning area to process nanopores with a diameter of 20-100nm structure.

[0025] figure 2 It is a schematic diagram of the application of silicon nitride nanopores in reverse electrodialysis power generation. The device is used for a container 1 containing a salt solution, and the container is...

Embodiment 2

[0029] Generating device and generating process are exactly the same as embodiment 1, just changed the following parameters in the generating device:

[0030] The concentration of the low-concentration potassium chloride solution in the device was fixed at 10 -4 mol / L, change the concentration of high-concentration potassium chloride in turn: 0.001mol / L, 0.01mol / L, 0.1mol / L and 1mol / L. And measure the I-V curve successively to obtain the power density of silicon nitride nanopore power generation (porosity gets 30%) such as Figure 4 . The results show that with the increase of the salt concentration difference, the power density increases from 3226W / m 2 Increase to 35350W / m 2 .

Embodiment 3

[0032] Generating device and generating process are exactly the same as embodiment 1, just changed the following parameters in the generating device:

[0033] The silicon nitride nanopores in the device were replaced by 40nm, 70nm, 97nm, and 140nm in turn, and the thickness of the silicon nitride film was constant. The I-V curve was measured and the power density was calculated (the porosity was 30%). Get the power density as Figure 5 , it is obvious that the smaller the aperture of the nanopore, the greater the power density obtained. When the silicon nitride nanopore diameter is 46nm, the maximum power density is 61956W / m 2 .

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Abstract

The invention discloses application of an ultrathin silicon nitride nanopore membrane in reverse electrodialysis power generation and a device. In the reverse electrodialysis power generation process,a high-concentration salt solution and a low-concentration salt solution form a concentration difference, so the cations in a high-concentration salt solution migrate into the low-concentration saltsolution through nanopores in a silicon nitride nanopore membrane by utilizing the cation selectivity of the silicon nitride nanopore membrane, and the cations directionally move to form an internal current; residual anions in the high-concentration saline solution are enriched on the surface of the anode electrode, the anode electrode and the anions are subjected to an oxidation reaction to loseelectrons, the electrons flow to the cathode electrode on the low-concentration saline solution side through an external circuit, and the cathode electrode obtains the electrons to be subjected to a reduction reaction to form a loop. According to the invention, the thickness and aperture of the silicon nitride film are selected from three aspects of ion selection performance, mechanical performance and processing difficulty of the ultrathin silicon nitride nanopore film, and high power generation efficiency can be obtained when the ultrathin silicon nitride nanopore film is applied to reverseelectrodialysis power generation.

Description

Technical field: [0001] The invention relates to the technical field of power generation by reverse electrodialysis, in particular to the application and device of an ultra-thin silicon nitride nanoporous membrane in reverse electrodialysis power generation. Background technique: [0002] With the development of society, people's demand for energy is increasing day by day. Since the third industrial revolution, electric energy has been widely used in all aspects of human life and production as a practical, economical, clean and easy-to-control and convert energy form. At present, the main power generation methods are thermal power generation and hydropower generation. The former needs to consume non-renewable resources and pollute the environment, while the latter requires a large amount of engineering and affects the ecological environment of the local watershed. Therefore, exploring an efficient, environmentally friendly and easy-to-control power generation method is in ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H02N3/00
CPCH02N3/00
Inventor 马建曾庆钰赵佳斌倪中华陈云飞
Owner SOUTHEAST UNIV
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