Method for coating nano copper with graphene

Abstract

The invention provides a graphene-coated nanometer and a preparation method thereof. The method comprises the following steps of firstly, selecting a carbon source, taking nano copper particles as a growth substrate, reducing gas as a shielding gas, and adopting a chemical vapor deposition method (CVD) under the action of energy (thermal energy, radio frequency, laser and the like), a gas reactantis excited to generate high-quality graphene on the growth substrate, the graphene-coated nano-copper is formed, and a graphene film grown by the nano-copper-based CVD has good monolayer property andcontinuity. The number of the generated graphene layers can be effectively controlled by controlling the addition amount of the carbon source, the growth temperature, the gas proportion and the like,wherein the source of the carbon source is abundant, the preparation process is simple and mild, the cost is low, the reliability is good, and large-scale industrial production can be realized. By coating the graphene, the oxidation resistance of the nano copper can be improved, meanwhile, the thermal conductivity of the nano copper is increased, and the nano copper is used as a good semiconductor solid crystal and interconnection material.

Description

technical field [0001] The invention relates to the technical field of conduction and heat dissipation of semiconductor interconnection materials, in particular to a method for coating nano-copper with graphene. Background technique [0002] Graphene is a two-dimensional carbon nanomaterial in which carbon atoms are arranged in an orderly manner in a honeycomb structure and connected to each other. It can be regarded as a single atomic layer of graphite. Its special structure and excellent physical properties make it a research hotspot. . The ideal single-layer graphene has a light transmittance as high as 97.7% and a carrier mobility as high as 15000cm2 / (V s) at room temperature. The theoretical Young's modulus can reach 11000GPa, the fracture strength can reach 125GPa, and the thermal conductivity can reach 5000W. / m·K has good prospects in new materials, electric power, microelectronics and other fields. [0003] Graphene has excellent optical, electrical, and mechanica...

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Problems solved by technology

[0005] The existing technology and equipment using solid carbon sources are complicated, and the processing temperature is high. Because the surface energy of nano-copper is high, it is easy to agglomerate. When the solid carbon source coats nano-copper, the coating is incomplete and the thickness of the coating is not uniform. Or the reaction is not complete, and the solid carbon source is easy to remain on the surface of the nano-copper particles, so that the quality of the graphene-coated nano-copper formed by it is poor.

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