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Porous dielectric material, preparation method thereof and capacitive pressure sensor

A technology of dielectric material and filling material, which is applied in the direction of fluid pressure measurement, instrument, and measurement force using capacitance change, can solve the problems of inability to further improve the sensitivity of capacitive pressure sensor and small dielectric constant, and achieve good flexibility. , High dielectric constant, the effect of improving yield

Active Publication Date: 2020-04-28
XIDIAN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the dielectric constant of the dielectric material in the prior art is generally small, which cannot further meet the requirements of improving the sensitivity of the capacitive pressure sensor.

Method used

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  • Porous dielectric material, preparation method thereof and capacitive pressure sensor
  • Porous dielectric material, preparation method thereof and capacitive pressure sensor
  • Porous dielectric material, preparation method thereof and capacitive pressure sensor

Examples

Experimental program
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Effect test

Embodiment 1

[0046] See figure 1 , figure 1 It is a flowchart of a method for preparing a porous dielectric material provided by an embodiment of the present invention.

[0047] The preparation method of the porous dielectric material comprises:

[0048] S1: Mixing a liquid metal and a liquid prepolymer of a polymer in a predetermined ratio to form a mixed solution;

[0049]In this embodiment, eutectic gallium indium or gallium indium tin alloy is selected as the liquid metal; platinum catalyzed silicone rubber, polydimethylsiloxane (PDMS) or silicone is selected as the polymer, and the polymer The material includes liquid prepolymer and matching curing agent. It should be noted that the silicone polymer material used in this example (such as platinum catalyzed silicone rubber, polydimethylsiloxane (PDMS) or silicone, etc.) contains two parts before mixing: prepolymer and The curing agent (cross-linking agent) is used together. After mixing the two parts, it will remain in a liquid sta...

Embodiment 2

[0086] On the basis of the first embodiment, this embodiment provides a porous dielectric material for a capacitive pressure sensor, and the porous dielectric material can be made by the preparation method described in the first embodiment.

[0087] Specifically, in this embodiment, eutectic gallium indium or gallium indium tin alloy is selected as the liquid metal; platinum catalyzed silicone rubber, polydimethylsiloxane (PDMS) or silicone is selected as the polymer, The polymer includes a liquid prepolymer and a corresponding curing agent.

[0088] Further, the liquid metal accounts for 10%-95% of the total mass of the porous dielectric material. as example one and Figure 5 As shown, as the volume fraction of liquid metal increases, the overall dielectric constant of the dielectric material increases gradually. However, too much liquid metal content will affect the flexibility and stretchability of the formed hybrid material, while too little liquid metal will lead to an ...

Embodiment 3

[0090] On the basis of the above embodiments, this embodiment provides a capacitive pressure sensor based on a porous dielectric material, the capacitive pressure sensor includes two electrode plates and a flexible dielectric between the two electrode plates layer, wherein the flexible dielectric layer is made of the above-mentioned porous dielectric material.

[0091] See Figure 8 , Figure 8 It is a performance curve diagram of a capacitive voltage sensor based on a porous dielectric material provided by an embodiment of the present invention, wherein the abscissa is the compressive stress, the ordinate is the capacitance, and different curves represent the liquid metal in the porous dielectric material. Volume ratio, liquid metal is 0% volume ratio, 10% volume ratio, 20% volume ratio, 30% volume ratio and 40% volume ratio. It should be noted that during the parameter test process, the liquid metal component is eutectic gallium indium, and the polymer component is platinu...

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Abstract

The invention discloses a porous dielectric material, a preparation method thereof and a capacitive pressure sensor, and the preparation method comprises the following steps: mixing a liquid metal with a liquid prepolymer of a polymer according to a preset proportion to form a mixed solution; adding a curing agent of the polymer into the mixed solution to form a liquid mixture of the liquid metaland the polymer; fully mixing the liquid mixture with a soluble filling material, and carrying out curing treatment to form a cured structure; and dissolving the soluble filling material by using a specific solvent to finally form the solid porous dielectric material with a variable dielectric constant. The capacitive pressure sensor comprises two electrode plates and a flexible dielectric layer located between the two electrode plates, and the flexible dielectric layer is made of the porous dielectric material. The porous dielectric material has a variable dielectric constant and good flexibility; and the capacitive pressure sensor has relatively high sensitivity.

Description

technical field [0001] The invention belongs to the technical field of capacitive pressure sensors, and in particular relates to a porous dielectric material, a preparation method thereof, and a capacitive pressure sensor. Background technique [0002] Pressure sensors are electronic devices that convert pressure signals into electrical signals, and are widely used in robotics, health care and other fields. A capacitive pressure sensor is a pressure sensor that uses a capacitive sensitive element to convert the measured pressure into an electrical output that has a certain relationship with it. Due to its high sensitivity and temperature independence, it has been widely studied in the field of pressure sensors. [0003] Capacitive pressure sensors are usually composed of a dielectric layer and two electrodes. External pressure acts on the surface of the sensor to compress the dielectric layer, reduce the distance between the two capacitor plates, and change the capacitance b...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C08J9/26C08L83/04C08K3/08G01L1/14G01L9/12
CPCC08J9/0066C08J9/26C08J2201/042C08J2201/0422C08J2201/0446C08J2383/04G01L1/142G01L9/12
Inventor 李杨杨嘉怡敖金平
Owner XIDIAN UNIV
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