Transmission electron microscope micro-grid based on heavy ion irradiation, and preparation method thereof

A technology of transmission electron microscopy and heavy ions, applied in the manufacture of electrode systems, manufacture of discharge tubes/lamps, circuits, etc., can solve problems such as difficult large-scale preparation, unfavorable resolution, and complicated preparation processes

Active Publication Date: 2020-10-23
LANZHOU UNIVERSITY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the preparation process is relatively complicated, the repeatability is poor, and it is difficult to prepare on a large scale.
However, in practical applications, because the thickness of the carbon film is relatively thick and it is easily affected by factors such as poor electrical conductivity and thermal conductivity of the "carrier support film", it will cause sample drift, jumping, and even rupture of the support film to a certain extent, which is seriously unsatisfactory. Conducive to the improvement of resolution
In the prior art, the microgrid is generally a circular sheet structure with a diameter of about 3 mm. Due to the small size of the microgrid, advanced technology and high manufacturing cost are required in the manufacture

Method used

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  • Transmission electron microscope micro-grid based on heavy ion irradiation, and preparation method thereof
  • Transmission electron microscope micro-grid based on heavy ion irradiation, and preparation method thereof
  • Transmission electron microscope micro-grid based on heavy ion irradiation, and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0039] A method for preparing a transmission electron microscope microgrid based on heavy ion irradiation, the specific steps are as follows:

[0040] (1) Irradiation of polyethylene terephthalate PET film:

[0041] The high-energy heavy ions are accelerated on the heavy ion accelerator, and the high-energy heavy ions are used to irradiate the surface of the polyethylene terephthalate PET film vertically. The thickness of the polyethylene terephthalate PET film is 5 μm. Among them, the LET linear energy transfer value of the high-energy heavy ions in the polyethylene terephthalate PET film is greater than 4.5 eV / nm, and the number of high-energy heavy ions irradiated on the polyethylene terephthalate film is 2.0 ×10 10 ions / cm 2 .

[0042] (2) Etching of nanopores of polyethylene terephthalate PET film:

[0043] The irradiated polyethylene terephthalate PET film was immersed in a sodium hydroxide solution for chemical etching, wherein the concentration of the sodium hydro...

Embodiment 2

[0047] A method for preparing a transmission electron microscope microgrid based on heavy ion irradiation, the specific steps are as follows:

[0048] (1) Irradiation of polyethylene terephthalate PET film:

[0049] The high-energy heavy ions are accelerated on the heavy ion accelerator, and the high-energy heavy ions are used to irradiate the surface of the polyethylene terephthalate PET film vertically. The thickness of the polyethylene terephthalate PET film is 30 μm. Among them, the LET linear energy transfer value of the high-energy heavy ions in the polyethylene terephthalate PET film is greater than 4.5 eV / nm, and the number of high-energy heavy ions irradiated on the polyethylene terephthalate film is 1.0 ×10 5 ions / cm 2 ;

[0050] (2) Etching of nanopores of polyethylene terephthalate PET film:

[0051] The irradiated polyethylene terephthalate PET film was immersed in a sodium hydroxide solution for chemical etching, wherein the concentration of the sodium hydro...

Embodiment 3

[0055] A method for preparing a transmission electron microscope microgrid based on heavy ion irradiation, the specific steps are as follows:

[0056] (1) Irradiation of polyethylene terephthalate PET film:

[0057] The high-energy heavy ions are accelerated on the heavy ion accelerator, and the high-energy heavy ions are used to irradiate the surface of the polyethylene terephthalate PET film vertically. The thickness of the polyethylene terephthalate PET film is 20 μm. Among them, the LET linear energy transfer value of the high-energy heavy ions in the polyethylene terephthalate PET film is greater than 4.5 eV / nm, and the number of high-energy heavy ions irradiated on the polyethylene terephthalate film is 3.0 ×10 6 ions / cm 2 ;

[0058] (2) Etching of nanopores of polyethylene terephthalate PET film:

[0059] The irradiated polyethylene terephthalate PET film was immersed in a sodium hydroxide solution for chemical etching, wherein the concentration of the sodium hydro...

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Abstract

A transmission electron microscope micro-grid based on heavy ion irradiation is composed of a microporous polyethylene glycol terephthalate (PET) film obtained by etching with a sodium hydroxide solution after high-energy heavy ion irradiation, and a metal film plated on the PET film through magnetron sputtering or thermal evaporation or electron beam evaporation and the like. The thickness of thePET film is 5-30 [mu]m, and the thickness of the metal film is 5-30 nm. The polyethylene glycol terephthalate (PET) film is irradiated by using heavy ions, then is etched to form micropores with uniform and adjustable aperture, and the transmission electron microscope micro-grid with high porosity and conductivity is obtained through etching, magnetron sputtering, thermal evaporation or electronbeam evaporation coating. The prepared transmission electron microscope micro-grid takes a heavy ion track film as a template, and the template is covered with the metal film with adjustable thicknessand type. The micro-grid for the transmission electron microscope is composed of a plurality of micropore structures which are uniform in aperture and adjustable in size, the micropore structures arepure, and interference of metal grids in a traditional micro-grid on component analysis of a tested sample can be effectively eliminated, so the accuracy during testing can be improved.

Description

technical field [0001] The invention relates to the technical field of transmission electron microscope microgrid preparation, in particular to a transmission electron microscope microgrid based on heavy ion irradiation etching technology and a preparation method. Background technique [0002] Transmission electron microscopy can observe submicrostructures or ultrastructures that cannot be observed with optical microscopes. By observing the ultrastructure of samples under the electron microscope and combining in-situ observation technology, researchers can deeply understand the essential characteristics of materials and promote the optimal design of materials. In transmission electron microscopy, microgrids are an important tool for carrying samples and performing high-resolution imaging observations. With the continuous development of research on nanomaterials with smaller sizes, the application of transmission electron microscopy in the field of characterization of nanoma...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J37/02H01J37/26H01J9/00
CPCH01J37/02H01J37/26H01J9/00
Inventor 刘德全李一丁刘建德刘艳杰孙楷焦朝晖谢志超常英凡贺德衍
Owner LANZHOU UNIVERSITY
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