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Organic-metal nano composite film as well as preparation method and application thereof

A composite film and metal nanotechnology, which is applied in metal material coating process, vacuum evaporation plating, coating, etc., can solve the problems of small film preparation area, impurity particle pollution, high cost of reactants, etc., and achieve the height of phase structure Controllable, large deposition area, wide application effect

Active Publication Date: 2020-12-04
CHONGQING UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The performance of a thin film is determined by its internal atomic content and bonding mode. Therefore, choosing a reasonable preparation technology and adjusting the process conditions is the key to obtaining a thin film with excellent performance. Commonly used preparation technologies include plasma-enhanced chemical vapor deposition, dielectric barrier discharge and Pulse laser deposition, etc., but these preparation technologies will bring a series of problems, such as impurity particle pollution, small film preparation area, low component controllability, high cost of reactants and even harmful to the environment, etc.

Method used

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  • Organic-metal nano composite film as well as preparation method and application thereof
  • Organic-metal nano composite film as well as preparation method and application thereof
  • Organic-metal nano composite film as well as preparation method and application thereof

Examples

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Comparison scheme
Effect test

Embodiment 1

[0041] The organic this embodiment - preparation of metal nano composite film, comprising the steps of:

[0042] 1) # 60, # 600 and # 1500 sandpaper number of successively grinding polytetrafluoroethylene mesh titanium target and a target, and then wipe clean after full infiltration ethanol nonwoven fabric;

[0043] 2) the target silicon wafer after polishing and cleaning charged magnetron sputtering chamber by the mechanical pump and molecular pump vacuum chamber evacuated to 3 × 10 -4 PA, the target shutter remains closed, argon flow rate adjustment of the degree of vacuum of 0.5 Pa, at a substrate temperature of 30 ℃, target - substrate distance 50mm, 30min pre-sputtering DC power at 100W, 200W rf power condition;

[0044] 3) adjusting the flow of argon so that the coating chamber pressure was raised to 1.0 Pa, DC and RF power is turned on, and the target polytetrafluoroethylene titanium target is started, the DC power was adjusted to 100W, RF power of 50W, the substrate temper...

Embodiment 2

[0047] The organic this embodiment - preparation of metal nano composite film, comprising the steps of:

[0048] 1) # 60, # 600 and # 1500 sandpaper mesh number of target sequence and grinding polytetrafluoroethylene titanium target, after full infiltration of absolute ethanol nonwoven wipe clean;

[0049] 2) Pump the coating chamber to 3 × 10 -4 PA, keep the target baffle closed, adjust the argon flow rate to cause the vacuum to 0.5Pa, at the substrate temperature of 30 ° C, the target-base distance 50mm, and the DC power 100W, the radio frequency power 200W is pre-sputtered under the conditions of 30 min;

[0050] 3) Adjusting the argon flow rate to raise the vacuum to 1.0Pa, turn the DC and RF power supply, enabling the polytetrafluoride target and the titanium target, adjust the DC power to 100W, the radio frequency power is 100 W, the substrate temperature is 25 ° C, At the same time, two target baffles are opened, and the single crystal silicon substrate rotation speed is 150 ...

Embodiment 3

[0053] The organic-metal nano-composite film of the present embodiment includes the following steps:

[0054] 1) Sitting of 60 #, 600 # and 1500 # disciplines in sequentially polished polytetrafluoroide target and titanium target, and then wiper wiper wiper and wiped adequate water absolute ethanol;

[0055] 2) Pump the coating chamber to 3 × 10 -4 PA, keep the target baffle closed, adjust the argon flow rate to cause the vacuum to 0.5Pa, at the substrate temperature of 30 ° C, the target-base distance 50mm, and the DC power 100W, the radio frequency power 200W is pre-sputtered under the conditions of 30 min;

[0056] 3) Adjusting the argon flow rate to raise the vacuum to 1.0Pa, turn on the DC and RF power, enabling the polytetrafluoroethylene target and the titanium target, adjust the DC power to 100W, the radio frequency power is 150W, the substrate temperature is 25 ° C, At the same time, two target baffles are opened, and the single crystal silicon substrate rotation speed is...

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Abstract

The invention discloses an organic-metal nano composite film as well as a preparation method and application thereof, and belongs to the technical field of composite materials. The organic-metal nanocomposite film is composed of a substrate layer and a fluorocarbon-titanium composite film layer. The preparation method comprises the following steps: grinding a polytetrafluoroethylene target material and a titanium target material, and cleaning; then carrying out pre-sputtering; depositing a fluorocarbon-titanium composite film on the surface of the substrate layer by virtue of co-sputtering; and then carrying out high-temperature annealing to obtain the product. According to the preparation method of the organic-metal nano composite film, the change of the deposition state of the film is changed by adopting the radio-frequency direct-current co-sputtering, so that nanoscale surface appearance and chemical component contents are regulated and controlled; and the crystallinity of the film is regulated and controlled by adjusting a high-temperature annealing process, so that the prepared composite film shows different infiltration properties and secondary electron emission characteristics, and has the advantages of high purity, large deposition area, high controllability of a phase structure and the like, thereby being wide in application and having remarkable popularization and practical values.

Description

Technical field [0001] The present invention belongs to the technical field of composite materials, particularly relates to an organic - metal nanocomposite film and preparation method and application. Background technique [0002] Mixing the composite film of two or more basic components together, is a hot field of materials science. The organic - metal composite film synergistic effect between the components, exhibit unique physical and chemical properties, it has been widely used in power electronics, optical sensing, biomedical and energy utilization. This type of composite film has both light transmittance, electrical conductivity, mechanical stability and flexibility of the metal thin film is an organic, corrosion resistance, ease of processing, it has important research value and broad application prospects. With the development of the times and technology, component regulatory composite films from micrometer to nanometer-scale in-depth, this theory of thin film formation ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/14C23C14/34C23C14/58
CPCC23C14/14C23C14/34C23C14/5806
Inventor 王飞鹏赵琦李剑黄正勇陈伟根王有元潘建宇谭亚雄王强杜林周湶
Owner CHONGQING UNIV
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