Multi-beam structure combined radio frequency micro electro mechanical system resonator and application

Abstract

The invention relates to a multi-beam structure combined radio frequency micro-electro-mechanical system resonator and an application, wherein the multi-beam structure combined radio frequency micro-electro-mechanical system resonator comprises an electro-mechanical conversion beam unit which is a transduction assembly of the input end and the output end of the resonator; an energy transmission beam which is a connecting structure of the electromechanical conversion beam unit; an electrode for applying a drive excitation; a dielectric layer which is a gap layer between the electromechanical conversion beam unit and the electrode; a base that plays a role in supporting the resonator; and a supporting structure used for realizing the suspension of the resonator. The multiple beam structuresachieve modal coupling through frequency matching, the distortion degree is small, a high Q value can be maintained and flexible setting of multiple resonant frequencies is achieved; so that good impact resistance and overload resistance are achieved, the beam structures can be used for constructing a multi-mode, multi-frequency-band and reconfigurable advanced wireless communication system, and the application potential of the beam structures under complex environment conditions is enhanced; therefore, internet-of-things effect is improved, and the environmental perception ability is enhanced.

Description

technical field [0001] The invention relates to a radio frequency microelectromechanical system, in particular to a radio frequency microelectromechanical system resonator with a multi-beam structure combination and its application. Background technique [0002] The future wireless communication system presents the development trend of integration, miniaturization, low power consumption, high frequency, and multi-mode. The application scenarios continue to expand, and the external environment it faces is becoming increasingly complex and harsh. A high-performance RF front-end transceiver system is the key to a wireless communication system. The RF resonant devices used in traditional RF front-end transceiver systems mainly include quartz crystal oscillators, surface acoustic wave (SAW) filters, film bulk acoustic resonators (FBAR), ceramic filters, and capacitor-inductor (LC) resonant circuits. However, the above-mentioned traditional devices have many limiting factors in t...

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Problems solved by technology

However, the traditional MEMS resonator with single-beam structure has limited electromechanical transduction area, low electromechanical coupling coefficient, large dynamic resistance, obvious impedance mismatch with the back-end RF processing circuit, high insertion loss, and serious energy dissipation.

In order to realize the cascading of traditional beam MEMS devices and back-end RF processing circuits, the traditional methods mainly include: (1) reducing the capacitance gap, which is limited by the process conditions; (2) increasing the bias voltage, which is limited Due to the breakdown voltage of the device, the applied voltage is limited; (3) using an array structure, this method greatly increases the space occupied by the device; (4) using high-gain circuit compensation, this method increases the power consumption of the system, and the high-gain circuit requires Multi-stage operational amplifier cascaded implementation, prone to nonlinear, self-excited oscillation and other phenomena, affecting the stability of the system

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