Visible infrared window antireflection film based on magnetron sputtering and preparation method

Abstract

The invention discloses a visible infrared window antireflection film based on magnetron sputtering and a preparation method, and belongs to the technical field of optical films. A magnetron sputtering coating method is mainly used, a conventional situation that efficient antireflection films are made of ytterbium fluoride, zinc sulfide and other soft film materials with low hardness is abandoned, but yttrium oxide, titanium oxide, aluminum oxide and other hard oxide protective films are used, and the visible, low-light and infrared common-window high-strength antireflection film capable of being used for a zinc sulfide base is formed through design optimization. The reflectivity of the film system can be 5% within the wave band range of 0.4-0.75um and 1.57 um, the transmittance of the film system can be larger than 92% within the wave band range of 7.4-10.7um, the surface quality and the firmness of a film layer are good, and the film system can resist friction tests specified in GJB2485-95 and test requirements of temperature, damp heat, salt mist and the like specified in GJB150A-2009.

Description

technical field [0001] The invention relates to the technical field of optical thin films, in particular to a magnetron sputtering-based visible infrared window anti-reflection film and a preparation method. Background technique [0002] CVD ZnS has a wide transmission band (0.6-13Lm), and can be cheap and large in size. It is the best material for the visible and infrared windows of military photoelectric observation and sighting instruments. However, due to its low surface hardness, the optical surface is vulnerable to damage when traveling at high speed. The infrared transmittance decreases due to damage, so the surface needs to be coated with a protective film; the protective films applied to the infrared window are mainly concentrated in diamond film, diamond-like film, boron phosphide film, germanium carbide film, hafnium oxynitride film, etc. [0003] 1. Conventional high-efficiency anti-reflection coatings use materials with low hardness such as ytterbium fluoride an...

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Problems solved by technology

[0003] 1. Conventional high-efficiency anti-reflection coatings use materials with low hardness such as ytterbium fluoride and zinc sulfide. Although they can meet the requirements of optical use, they are easy to cause damage to the coating in harsh environments such as deserts and rainforests;

[0004] 2. Diamond-like film is often used as a conventional hard protective film for infrared protection materials, but it has high internal stress and large absorption, and it is difficult to deposit thick films;

[0005] 3. Diamond film is the most ideal choice for protective film, but there are big problems in large-area deposition, thermal mismatch, cost, etc.;

[0006] 4. It has been reported that hafnium oxynitride film can be used for the protection of infrared zinc sulfide materials, but the refractive index of the film is relatively close to that of zinc sulfide materials, and the reported single-layer hafnium oxynitride film cannot meet the requirements of multi-spectral anti-reflection

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