System for producing silane, monochlorosilane, dichlorosilane and hexachlorodisilane

Abstract

The invention discloses a system for producing silane, monochlorosilane, dichlorosilane and hexachlorodisilane. The system comprises a raw material synthesis system, a silane synthesis system, a monochlorosilane synthesis system, a dichlorosilane synthesis system and a hexachlorodisilane synthesis system, wherein the raw material synthesis system comprises a hydrogenation system, a disproportionation tower I, a disproportionation tower II, a condenser I and a condenser II; the condenser I is fixed at the top end of the disproportionation tower I and is communicated with the disproportionation tower I; the condenser II is fixed at the top end of the disproportionation tower II and is communicated with the disproportionation tower II; an inlet of the hydrogenation system is communicated with the hexachlorodisilane synthesis system; the top outlet is communicated with the inlet of the disproportionation tower I; the top outlet of the disproportionation tower I is communicated with an inlet of the disproportionation tower II, and a bottom outlet of the disproportionation tower I is communicated with an inlet of the hexachlorodisilane synthesis system; a bottom outlet of the disproportionation tower II is communicated with an inlet of the disproportionation tower I, and a top outlet of the disproportionation tower II is communicated with an inlet of the silane synthesis system.

Description

technical field [0001] The invention relates to the technical field of chemical synthesis, more specifically to a system for producing silane, monochlorosilane, dichlorosilane and hexachlorodisilane Background technique [0002] Silane is mainly used in the preparation of ultra-large or ultra-large-scale integrated circuits, chips, flat panel displays, amorphous silicon thin-film solar cells, growth of high-purity polysilicon, preparation of silicon nitride, preparation of silicon carbide powder, etc. At present, there are three main production processes of silane: silicon-magnesium alloy process and metal hydride process. [0003] Monochlorosilane is an inorganic silicon compound with the chemical formula SiH 3 Cl, the English name is: monochlorosilane, and the English abbreviation is MCS. At present, monochlorosilane is more used as an intermediate to synthesize compounds such as TSA, which is widely used in the semiconductor chip industry and the solar energy industry. ...

AI Technical Summary

Problems solved by technology

[0006] At present, the synthesis methods of hexachlorodisilane include silicon powder tetrachloride method, chlorodisilane synthesis method, silicon or silicon alloy chlorination synthesis method, etc.; the production of hexachlorodisilane by silicon powder method has the advantage of cheap raw materials, but Its low selectivity and relatively expensive catalysts limit its development; chlorodisilane also has the advantage of cheap raw materials, but chlorodisilane is generally recovered from polysilicon raffinate, and the source of raw materials is unstable and cannot be produced on a large scale; silicon or silicon There is metal pollution in the products of the alloy method, and the separation process is more cumbersome

[0007] However, there is currently no system and method for dichlorosilane and hexachlorodisilane that can simultaneously produce silane, monochlorosilane

Images