A kind of composition for cleaning OLED mask and crucible

Abstract

The invention discloses a composition for cleaning an OLED mask plate and a crucible, which belongs to the field of wet electronic chemicals. The components contained in the composition are calculated by mass percentage as follows: 5-20% of an inorganic strong alkaline substance, an organic alkali 0.5-15%, organic auxiliaries 0.1-50%, chelating agent 0.1-10%, PEG-Gemini type nonionic surfactant 0.01-10%, and the balance is water. The obtained composition of the invention can quickly and effectively remove the lithium fluoride electrode material attached to the mask plate and the crucible of the evaporation equipment in the evaporation process, is easy to clean without residue, and can effectively improve the cleaning efficiency.

Description

technical field [0001] The invention belongs to the field of wet electronic chemicals, and in particular relates to a composition for cleaning an OLED mask plate and a crucible of an evaporation equipment, which can quickly and effectively clean and remove the fluoride attached to the mask plate and the crucible in the evaporation process. Lithium electrode material, easy to clean without residue, can effectively improve the cleaning efficiency of masks and crucibles. Background technique [0002] Flat panel display (FPD) is one of the most important optoelectronic products at present. The current mainstream flat panel displays can be divided into liquid crystal display (LCD) and organic light emitting diode (OLED). Among them, OLED displays have the characteristics of self-luminescence, wide color gamut, wide viewing angle, short response time, high luminous efficiency, low operating voltage, thinner and lighter, etc. In addition, large-sized and warpable panels can be prod...

AI Technical Summary

Problems solved by technology

[0004] The cleaning of the traditional crucible and FMM upper electrode materials mainly uses pickling, which is not only highly corrosive, but also the waste acid produced is difficult to handle, pollutes the environment, and increases the cost of OLED display preparation

Patent CN 11501085A discloses a cleaning method for Mask in vacuum evaporation equipment, which uses nitric acid solution as electrolyte, uses Mask to be cleaned as anode, and dissolves the metal film on the surface of Mask in nitric acid electrolyte by connecting with the negative electrode of the power supply to achieve cleaning However, there are still problems such as strong acidity, strong corrosion, environmental pollution of waste acid produced, and high treatment cost.

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