Method for improving performance of NiZn ferrite film prepared by rotary spraying

Abstract

The invention discloses a method for improving the performance of a NiZn ferrite film prepared by rotary spraying, and belongs to the technical field of film preparation. The method comprises the following steps: 1) cleaning a substrate; 2) adding soluble divalent ferrous salt, nickel salt and zinc salt into deionized water to prepare a reduction reaction solution, and adding sodium nitrite, acetate and acetic acid into the deionized water to prepare an oxidation reaction solution; and 3) depositing for 10-60 minutes under the conditions that the temperature of the substrate is 90-95 DEG C, the rotating speed is 100-150 r / min, the supply rate of the oxidation and reduction reaction liquid is 0.6-1.0 L / h and the ultrasonic atomization power is 2-3 W. An acetic acid-sodium acetate buffer pair is constructed in the oxidation liquid in advance, so that the concentration stability of OH<-> ions in a solution reaction system is improved, the film forming quality of the NiZn ferrite film prepared by a rotary spraying method is improved, and the film has better crystallinity, more uniform crystal grains and higher saturation magnetization and magnetic conductivity.

Description

technical field [0001] The invention belongs to the technical field of thin film preparation, and in particular relates to a method for improving the performance of NiZn ferrite thin film prepared by spin spraying. Background technique [0002] In view of the demand for thin-film magnetic cores for on-chip inductors used in system-on-chip (SoC), it is necessary to focus on solving the problem of low-temperature deposition of high-performance magnetic thin films. Although the crystallization temperature of the metal film is low, due to its low resistivity, the eddy current loss is large, so it cannot be applied to high frequency, and the NiZn ferrite magnetic film has an incomparable performance in the high frequency band due to its high resistivity and excellent insulation performance. Advantage. Traditional methods for preparing ferrite thin films include sputtering, pulsed laser deposition, spray pyrolysis, chemical vapor deposition, and sol-gel methods. The above ferrite...

AI Technical Summary

Problems solved by technology

[0006] The technical problem to be solved by the present invention is to provide an improved rotary spraying method for the problems of high iron content, unstable film formation, low magnetic permeability and saturation magnetization of the existing NiZn ferrite film prepared by rotary spraying. Method of NiZn Ferrite Thin Film Properties

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