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Transition metal nitride coating with nano multilayer structure as well as preparation method and application thereof

A nano-multilayer, transition metal technology, applied in metal material coating process, metal processing equipment, coating and other directions, can solve the problem that PVD coating cannot have both high hardness and toughness and bonding strength of film base, etc. The effect of grain refinement, good controllability and simple preparation process

Pending Publication Date: 2021-09-21
BICHAMP CUTTING TECH (HUNAN) CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0007] The second object of the present invention is to provide a preparation method and application of the transition metal nitride coating with a nano-multilayer structure, which solves the problem that the PVD coating deposited on the hob substrate for milling teeth of a bimetallic band saw blade cannot With the technical problems of high hardness and toughness as well as the bonding strength of the film base, the coated hob for milling bimetallic band saw blades prepared by this method can achieve synergistic improvements in quality, cost and efficiency

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  • Transition metal nitride coating with nano multilayer structure as well as preparation method and application thereof
  • Transition metal nitride coating with nano multilayer structure as well as preparation method and application thereof
  • Transition metal nitride coating with nano multilayer structure as well as preparation method and application thereof

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preparation example Construction

[0054] The invention also discloses a preparation method of a transition metal nitride coating with a nano-multilayer structure, which comprises the following steps:

[0055] Depositing a nitride bonding layer on the surface of the metal substrate;

[0056] Depositing a nanometer multi-layer nitride functional layer on the surface of the nitride bonding layer;

[0057] The voltages of bias gradient deposition are -20V nm-100V, -20V nm-200V, -20V nm-300V in sequence.

[0058] The metal substrate adopts the hob substrate, and the nanometer multilayer nitride functional layer deposited by arc ion plating on the hob substrate has a modulation period thickness of 3.5nm-80.0nm. In the modulation period, the TiAlN modulation layer and Cr( Al) The modulation ratio of the N layer is 1:10 to 10:1.

[0059] First, the nitride bonding layer is prepared by arc ion plating, and the bonding force between the coating and the substrate is enhanced through the design of the bias gradient, and...

Embodiment 1

[0074] After the hob is ultrasonically cleaned and dried, it is placed in a coating furnace, and argon and hydrogen are injected. Under the conditions of power of 2.0kW, air pressure of 1.2Pa and increasing bias gradient from -100V to -600V, the tool substrate was ion-etched using the anode layer ion source, and the etching time was 45 minutes. Then turn off the ion source, argon and hydrogen, and after the residual gas is exhausted by the vacuum system, then inject nitrogen, and turn on the arc ion plating TiAl target. The target current is 150A and the bias voltage is -40V~-120V. , the air pressure is 3.5Pa, the rotation rate of the substrate support is 2.0rpm, and the revolution rate is 2.0rpm. The TiAlN bonding layer with a thickness of 1.0 μm is deposited, and the deposition time is 40 minutes; then run the CrAl target at the same time, and adjust the total air pressure to 4.0Pa , the bias voltage is an increasing gradient of -40V to -150V, the CrAl target current is 150A...

Embodiment 2

[0085] After the hob is ultrasonically cleaned and dried, it is sent into the coating furnace and argon gas is introduced. Under the condition of bias voltage of -600V~-1200V and air pressure of 1.0Pa, ion etching was carried out on the tool substrate by glow discharge, and the etching time was 30 minutes. Afterwards, the argon gas is turned off, nitrogen gas is introduced, and the arc ion plating CrAl target is turned on. The target current is 120A, the bias voltage is -40V to -150V, the pressure is 3.0Pa, the rotation rate of the substrate support is 3.0rpm, and the revolution rate is 3.0rpm. Deposit a ~0.5μm thick CrAlN bonding layer under the condition of 2.0rpm, and the deposition time is 20 minutes; then start the TiAl target at the same time, the target current is 100A, the total pressure is 2.5Pa, and the bias voltage is incrementally from -30V to -200V Gradient, under the condition that the rotation rate of the substrate support is 3.0 rpm and the revolution rate is 2...

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Abstract

The invention relates to a transition metal nitride coating with a nano multilayer structure as well as a preparation method and application thereof. The transition metal nitride coating with the nano multilayer structure comprises a nitride bonding layer deposited on the surface of a hobbing cutter base body, wherein a nano multilayer nitride functional layer is deposited on the surface of the nitride bonding layer; the nano multilayer nitride functional layer comprises a TiAlN modulation layer and a Cr (Al) N modulation layer, and is prepared by alternately stacking and depositing the TiAlN modulation layer and the Cr (Al) N modulation layer. Through the microstructure design of a coating material, different modulation layers of the transition metal nitride coating with the nano multilayer structure form a coherent or semi-coherent interface, the hardness, toughness, film-substrate binding force, wear resistance, friction reduction and high-temperature performance of the coating are all improved, and the coating is mainly used for the field of gear milling machining of bimetal band saw blades.

Description

technical field [0001] The invention relates to the field of preparation of coating materials for hob milling cutters for milling teeth of bimetallic band saw blades, in particular to a nano-multilayer structure transition metal nitride coating and its preparation method and application. Background technique [0002] The manufacturing process of high-end CNC machine tools and robots, aerospace equipment, advanced rail transit equipment, energy-saving and new energy vehicles all involves the use and efficient cutting of various difficult-to-machine materials. Cutting is almost the first process faced by all metal raw materials in the machinery manufacturing industry, and sawing is a commonly used way of cutting. In 1933, Doerr Corporation of the United States invented the band saw machine and band saw blade, leading the efficiency revolution in the field of sawing processing. In 1964, Dürr successfully developed a bimetallic band saw blade. Compared with single metal band sa...

Claims

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Application Information

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IPC IPC(8): C23C14/06C23C14/32B23C5/00
CPCC23C14/0641C23C14/325B23C5/00
Inventor 张权刘国跃贾寓真欧阳志勇薛寒
Owner BICHAMP CUTTING TECH (HUNAN) CO LTD
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