Erbium-doped lithium niobate film-based frequency-stabilized and frequency-modulated laser and production method
A technology of erbium lithium niobate and lasers, which is applied in the field of lasers, can solve the problems of overlap and deterioration of the pump mode spot and the laser mode spot, deteriorate the quality of the output mode spot, and affect the output power, etc., and achieve narrow linewidth and large gain , The effect of increasing the power in the cavity
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
preparation example Construction
[0057] The preparation method of the frequency-stabilized and frequency-modulated laser based on the erbium-doped lithium niobate thin film comprises the following steps:
[0058] 1) The erbium-doped lithium niobate thin film 1 on an insulator is selected as the matrix material, and the chip is followed by a substrate 3, a silicon dioxide cladding layer 2 and an erbium-doped lithium niobate thin film 1 from top to bottom, and the erbium-doped lithium niobate thin film 1 is Thin film 1 has a thickness of 0.4-0.8 microns, lithium niobate is x-cut, and the doping concentration of erbium ions is 0.5-1.5 mol%; the silicon dioxide cladding 2 is thicker than 2 microns, and is used as the lower cladding of the waveguide Layer; the material of the substrate 3 can be silicon, lithium niobate or other materials, which play a supporting role, and the thickness is generally several hundred microns;
[0059] 2) Deposit a silicon nitride film on the substrate material using a low-pressure ch...
Embodiment
[0072] In a preferred embodiment, the thickness of the erbium-doped lithium niobate film is 0.6 microns, the thickness of the silicon dioxide cladding layer is 2 microns, and the thickness of the silicon substrate material is 400 microns. The thickness of the silicon nitride film is 100nm. The first tapered waveguide area and the second tapered waveguide area have the same parameters, the straight waveguide has a width of 1 micron and a length of 100 microns, and the tapered waveguide has a minimum width of 1 micron, a maximum width of 3 microns and a length of 500 microns. The minimum distance between the metal electrode and the grating is 4 microns. 1480nm, the laser wavelength and the resonant wavelength of the first grating region are both 1531nm, and the pumping wavelength and the resonant wavelength of the second grating region are both 1480nm.
[0073] figure 1 A structural schematic diagram of the present invention is provided, figure 2 Under the parameters of the ...
PUM
| Property | Measurement | Unit |
|---|---|---|
| Thickness | aaaaa | aaaaa |
| Thickness | aaaaa | aaaaa |
| Thickness | aaaaa | aaaaa |
Abstract
Description
Claims
Application Information
Login to View More 

