Preparation method of TiAlSiN and CrAlSiN nano composite coating

Abstract

The invention discloses a preparation method of a TiAlSiN and CrAlSiN nano composite coating. The preparation method comprises the following steps that S1, a WC-Co matrix is subjected to mechanical grinding, polishing and cleaning treatment; s2, sputtering a TiSi target and a CrSi target in front of the WC-Co substrate by using a magnetron sputtering power supply; according to the method, on the basis of the PVD thin film deposition plasma characteristic research theory, the cathode arc evaporation technology has the high ionization characteristic, the ionization rate of magnetron sputtering is low, the magnetron sputtering power source is used, TiSi and CrSi targets are sputtered in front of the substrate, a silicon deposition source is obtained through the magnetron sputtering method, and the TiAl and CrAl targets are deposited in front of the WC-Co substrate through the cathode arc evaporation power source. The Si < + > energy and the ionization rate are low, so that the diffusion capability is weak, the amorphous SiNx can be located at a grain boundary or an interface, and finally, the production of an amorphous SiNx interface phase is facilitated; a cathode arc evaporation power supply is used, TiAl and CrAl targets are subjected to arc evaporation in front of a substrate, high ionization of Ti, Cr and Al is achieved, solid solution grains are easily formed, and the mechanical property is excellent.

Description

technical field [0001] The invention relates to a preparation method, in particular to a preparation method of TiAlSiN and CrAlSiN nanocomposite coatings, belonging to the technical field of nanocomposite coatings. Background technique [0002] my country is the world's largest manufacturing and processing base with the most complete industrial structure. The metal cutting industry consumes a large amount of cutting tools every year. With the further optimization of my country's industrial structure, the demand for high-quality precision metal cutting will continue to rise. Efficient, high-speed, high-precision cutting has become the main development direction of modern processing technology. In high-speed dry cutting, due to the severe friction between the tool and the surface of the processed material, the cutting temperature is as high as 900°C-1200°C, so the tool has problems such as high-temperature oxidation, poor red hardness, and severe wear. Depositing a hard coat...

AI Technical Summary

Problems solved by technology

[0004] 1. Although it has a time-hardening effect, the mechanical properties of TiAlN coatings are poor under high temperature, protective atmosphere or vacuum conditions, but the oxidation initiation temperature of TiAlN coatings in air environments is lower than 800 °C;

[0005] 2. The high-temperature friction coefficient of TiAlN coating is large, which can easily lead to high cutting force, chatter and serious wear of the tool;

However, studies have found that with the introduction of Si elements, soft w-AlN (wurtzite-AlN) is easily precipitated in TiAlSiN and CrAlSiN, resulting in a sharp decline in coating mechanics and wear resistance, and ultimately destroys the service performance of the coating.

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