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High-efficiency on-chip acousto-optic deflector and preparation method thereof

An acousto-optic deflector, high-efficiency technology, applied in microlithography exposure equipment, instruments, optics, etc., can solve the problems of large coupling area size of acousto-optic deflector, insufficient utilization of acoustic wave energy, etc., to achieve the solution of acoustic energy utilization Insufficient efficiency, improved acousto-optic interaction, and solved the effect of excessive size of the coupling region

Pending Publication Date: 2022-08-05
SUN YAT SEN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The present invention uses a coupler structure to reduce the structural size of the existing acousto-optic deflector, and makes full use of the coupling of sound waves and light waves for high-efficiency deflection. On the one hand, it solves the disadvantages of the traditional acousto-optic deflection for insufficient utilization of sound wave energy. On the other hand, Solved the defect that the coupling area of ​​the acousto-optic deflector was too large

Method used

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  • High-efficiency on-chip acousto-optic deflector and preparation method thereof
  • High-efficiency on-chip acousto-optic deflector and preparation method thereof
  • High-efficiency on-chip acousto-optic deflector and preparation method thereof

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Embodiment 1

[0035] like figure 1 As shown, a high-efficiency on-chip acousto-optic deflector includes a lithium niobate-silicon nitride heterostructure disposed on a silicon oxide substrate; the lithium niobate-silicon nitride heterostructure includes a lithium niobate film and a photonic multi-mode coupler 2 formed with a silicon nitride structure integrated on the lithium niobate film; the lithium niobate film is provided with an excitable acoustic wave interdigital transducer 4, and the interdigital transducer 4 includes Several interdigitated electrodes. The invention comprehensively utilizes the excellent piezoelectric properties of the lithium niobate film and the diffraction effect of the acoustic grating, and places the interdigital transducer 4 on the side of the photonic waveguide coupler to realize the high-efficiency deflection effect of the surface acoustic wave on the photons. The invention uses the coupler structure to reduce the structure size of the existing acousto-opti...

Embodiment 2

[0044] The present embodiment provides a method for preparing a high-efficiency on-chip acousto-optic deflector, comprising the following steps:

[0045] S1. On the substrate covered with the lithium niobate film, a silicon nitride film with a thickness of 200 nm is deposited by chemical vapor deposition;

[0046] S2. Using electron beam direct writing system (EBL, Vistec EBPG 5000+) to expose positivity electron paste (APR6200) on the pre-prepared silicon nitride film; the thickness is about 400nm, and then bake on a hot plate at 130°C After baking for 5 minutes, the required waveguide and coupler patterns can be obtained on the electronic glue after developing with xylene;

[0047] S3. Using reactive ion etching equipment, using the pattern obtained on the electronic glue as a mask, dry etching is performed, and the sidewall morphology is required to be smooth and steep; the etching parameters are set at any time according to the etching effect of the equipment;

[0048] S4...

Embodiment 3

[0053] As shown in the figure, it is a schematic diagram of the corresponding test system of the present invention. The test system mainly includes: a tunable laser, an optical fiber, a polarization controller, a photodetector, a vector network analyzer, and a spectrometer.

[0054] During device testing, the process of converting microwaves to surface acoustic waves is based on the inverse piezoelectric coupling effect of lithium niobate films. The interdigital transducer 4 converts the input microwave electrical signal into the surface acoustic wave signal of the lithium niobate film, so that the lithium niobate film has periodic mechanical strain field distribution, forming an equivalent Bragg grating, when the light wave in the optical waveguide After passing through the structure of periodic strain distribution, the direction will be deflected. The photons in the deflected direction will be output through the waveguide on the upper side, and the output optical signal will...

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Abstract

The invention relates to the technical field of on-chip integrated photonics, in particular to a high-efficiency on-chip acousto-optic deflector and a preparation method thereof. Comprising a lithium niobate-silicon nitride heterostructure arranged on a silicon oxide substrate, and the lithium niobate-silicon nitride heterostructure comprises a lithium niobate film and a multi-mode coupler structure formed by silicon nitride. And an interdigital transducer capable of exciting sound waves is arranged on the lithium niobate film. According to the invention, the piezoelectric characteristic and acoustic grating diffraction effect of lithium niobate are utilized, the principle of a multi-mode coupler in an integrated interdigital transducer and a photonic waveguide is utilized, photons generate Bragg diffraction through a periodic structure formed by acoustic waves, and finally deflection is realized. According to the acousto-optic deflector, the size of the on-chip acousto-optic deflector is reduced, the interaction between phonons and photons is enhanced, the efficiency is improved, the used lithium niobate and silicon nitride materials are stable in property and easy to process, and on-chip large-scale integration can be achieved.

Description

technical field [0001] The invention relates to the technical field of on-chip integrated photonics, and more particularly, to a high-efficiency on-chip acousto-optic deflector and a preparation method thereof. Background technique [0002] Acousto-optical device is a multi-physics coupling element that utilizes the interaction of sound and light waves, and is an indispensable device in the interaction of microwave and light waves. Although these acousto-optic devices are based on structures such as on-chip waveguide electrodes, and use the principle of interaction between acoustic waves and light waves, they are very different in function, structure and application. Various application scenarios have been developed on the market. and structured acousto-optic devices, such as acousto-optic modulators, acousto-optic frequency shifters, acousto-optic deflectors, acousto-optic filters, and acousto-optic Q switches, etc., are used to effectively control the intensity, direction ...

Claims

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Application Information

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IPC IPC(8): G02F1/11G02F1/125G03F7/20
CPCG02F1/11G02F1/125G03F7/2059
Inventor 李朝晖杨志强
Owner SUN YAT SEN UNIV
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