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Anode welding process for metal-glass and metal-ceram

A glass and metal technology, applied in the field of connection of heterogeneous materials, can solve problems such as the limitation of welding range

Inactive Publication Date: 2004-11-03
XI AN JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The focus of its research is welding in vacuum or under the protection of inert gas, and its welding range is limited by vacuum equipment

Method used

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  • Anode welding process for metal-glass and metal-ceram
  • Anode welding process for metal-glass and metal-ceram
  • Anode welding process for metal-glass and metal-ceram

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0034] Example 1: Aluminum-K 4 Anodic welding of glass

[0035] Material Composition:

[0036] The experimental material is K 4 Glass and pure aluminum, the size of glass and aluminum sheet is 12mm×12mm, the surface needs to be mechanically polished, and cleaned in acetone and alcohol respectively. welding process in figure 1 The welding in the atmosphere is carried out in the experimental equipment shown, and it is cooled to room temperature with the furnace after welding.

[0037] Within the optimal process parameters (temperature 250°C-400°C, voltage 600V-800V), the welding rate is over 90%. The test shows that the welding rate increases with the increase of temperature and voltage. The effect of the elevated temperature is to detach the weaker-connected ions in the glass and move directionally under the action of the electric field. An increase in temperature is conducive to ion diffusion. However, as the temperature increases, the thermal expansion coefficient misma...

Embodiment 2

[0040] Example 2: Kovar-K 4 Anodic welding of glass

[0041] Kovar alloy has a linear expansion coefficient similar to that of borosilicate glass at 20°C to 450°C and good low-temperature stability. During the welding process with metals, it can reduce the thermal stress caused by the different thermal expansion coefficients of dissimilar materials. . The welding parts of this alloy and glass are mainly used in electric vacuum components, such as launch tubes, oscillators, sealing plugs, magnetrons, etc.

[0042] K 4 The glass sample size is 10mm×10mm×2mm, and the Kovar alloy sample size is 10mm×10mm×15mm.

[0043] The test process will K 4 The surface of glass and Kovar alloy is polished on one side, and the surface roughness reaches 0.5 μm to 1.0 μm, and then cleaned with acetone and alcohol, and the two polished surfaces are relatively attached, and assembled in a fixture, wherein the Kovar alloy is connected to the anode , K 4 The glass is connected to the cathode, s...

Embodiment 3

[0047] Embodiment 3: anodic welding of K4 glass and monocrystalline silicon chip

[0048] K 4 The sample size of the glass is 10mm×10mm×2mm. The sample size of the single crystal Si wafer is 10mm×10mm×0.3mm.

[0049] The welding test device and process samples are surface polished (roughness 0.5-1.0 μm) and surface cleaned (clean the surface with acetone and alcohol) before assembly. After the two samples are assembled, they are put into the furnace, and the silicon wafer and the anode connected, and the glass is connected to the cathode. After the sample is heated to a temperature of 350°C to 400°C, apply a DC voltage of 710V to 840V to the sample to be welded, keep it for 15 to 50 minutes, disconnect the power supply, and cool the sample with the furnace.

[0050] During the welding process, the test system is used to record the change of the current, and it is found that the welding current rises monotonously to a maximum value and then decreases slowly. During the weld...

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Abstract

The present invention discloses anode welding method for metal and glass and ceramic and belongs to the field of different material connection technology. Under atmosphere and at low welding temperature, the present invention complete solid connection directly without any added intermediate material. Precision welding may be completed in vacuum, protecting atmosphere and air with less deformation of the workpiece and in simple technological process. The present invention may be used in welding including borosilicate glass, fiber optical glass, quartz and other non-metal material and Kovar, Fe-Ni, Al and other alloy and metal material as well as the sealing of Si, GaAs and other semiconductor material. The said technological process requires high surface processing precision and is used mainly in micro mechanism and mini sensor manufacture, electric vacuum technology, aeronautics and astronautics and other fields.

Description

technical field [0001] The invention belongs to the technical field of connection of heterogeneous materials. In particular, it relates to an anodic welding method between metal, glass and ceramics. Background technique [0002] With the development of science and technology and new materials, the connection (sealing) technology of metals, glass and ceramics (insulating materials) has been continuously developing, and its application in industry is increasing, and its importance is increasing day by day. [0003] The connection methods of metal and ceramics and glass mainly include: vacuum brazing, bonding, and steaming. The above methods usually have the following defects: [0004] The vacuum brazing connection of ceramics and metals requires high temperature and vacuum equipment, which consumes a lot of energy. [0005] The evaporation method is to place ceramics or glass in a vacuum to vaporize the metal, thereby metallizing the surface of the ceramic or metal, which c...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B23K31/12
Inventor 薛锦潘希德王裕文蔚晓嘉卢学刚孟庆森喻萍张丽娜董现春
Owner XI AN JIAOTONG UNIV
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