Radiation-sensitive resin composition, patterned resin film, method for formation of the film, and use thereof
A technology of resin composition and radiation, which can be applied in the direction of photolithography, optics, and optomechanical equipment on the pattern surface, and can solve the problems of inability to obtain heat discoloration, inability to maintain transparency, and low productivity.
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[0095] Hereinafter, the present invention will be described more concretely with reference to synthesis examples, examples, and comparative examples. "Parts" and "%" in each example are based on mass (weight basis) unless otherwise specified.
Synthetic example 1
[0097] 8-methyl-8-methoxycarbonyltetracyclo[4.4.0.1 as an alicyclic olefin monomer 2,5 .1 7,10 ] 60 parts of dodec-3-ene, 40 parts of N-phenyl-(5-norbornene-2,3-dicarboxyimide), 72 parts of 1-hexene and 300 parts of toluene, add nitrogen gas In the reaction vessel, after heating to 60°C, add 0.248 parts of triethylaluminum 1.5 mol / liter toluene solution and modify under the condition of tert-butanol / methanol / tungsten=0.25 / 0.3 / 1 (molar ratio) WCl 6 3.7 parts of the solution (0.05 mol / liter) were stirred at 80° C. for 3 hours to perform ring-opening polymerization to obtain a ring-opened copolymer having a weight average molecular weight of 17,000. The polymerization conversion was about 100%.
[0098] Then, 1,000 parts of the obtained ring-opening copolymer solution was added to the autoclave, and RuHCl(CO)[P(C 6 h 5 ) 3 ] 19.5 parts, then add the air pressure to be 100Kg / cm 2 hydrogen gas, while stirring at a reaction temperature of 165° C. for 3 hours to carry out a hy...
Synthetic example 2
[0104] In addition to the composition of the alicyclic olefin monomer becomes 8-methyl-8-methoxycarbonyl tetracyclic [4.4.0.1 2,5 .1 7,10 ] 70 parts of dodec-3-ene, 20 parts of N-phenyl-(5-norbornene-2,3-dicarboxyimide) and tetracyclo[4.4.0.1 2,5 .1 7,10 ] Except for 10 parts of dodec-3-ene, the others are the same as in Synthesis Example 1. After the ring-opening polymerization, the overlapping conversion rate is about 100%, the weight average molecular weight is 21,100, the hydrogen addition rate is 100%, and the hydrolysis rate is 97%. % of cycloaliphatic olefin resin (polymer A2).
[0105] This polymer A2, after 1 H-NMR spectrum analysis confirmed that it was a substance having repeating units (I), (II) and (III) represented by the following formulae.
[0106]
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