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Preparation method of flexible thin film Ni resistance sensor

A sensor and thin film technology, applied in the field of thin film Ni resistance sensor, can solve the problems of not being too thin and too thin, slow response of temperature sensing time, etc., to prevent surface oxidation and dirt adhesion, good mechanical strength and stable performance durable effect

Inactive Publication Date: 2010-02-24
HANGZHOU JINGCHENG PHOTOELECTRIC +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] Traditional thermal resistance sensors use solid substrates such as ceramic sheets, silicon sheets or glass as carriers. Due to mechanical strength, the solid substrates cannot be made too thin or thin, generally at least a few tenths of a millimeter, which limits the size of the device. Lower limit of heat capacity, slow temperature response time

Method used

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  • Preparation method of flexible thin film Ni resistance sensor
  • Preparation method of flexible thin film Ni resistance sensor
  • Preparation method of flexible thin film Ni resistance sensor

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0033] ●The polyimide film with a thickness of 75um is brushed with detergent-soaked for 1 hour-rinsed-dried, sent to an electron beam evaporation coating machine for Ni plating, and the thickness of the Ni film is monitored with transmitted light until no transmitted light is detected. The purity of the Ni material is 99.999%. At this time, the square resistance of the Ni film is about R=1Ω, and its thickness is about 0.1um.

[0034] ●Put the above-mentioned polyimide film with Ni conductive layer into the cathode of the electroplating tank, the plating solution formula is: (g / L) nickel sulfate 180, phosphoric acid 38, sodium chloride 10, sodium lauryl sulfate 0.1, Sodium sulfate 60, magnesium sulfate 35. Plating current density 1A / dm 2 , PH value of electroplating solution 4, temperature 35 ℃, thicken Ni film by electroplating, make square resistance to 25mΩ, measure with low resistance meter, the anode Ni used is 99.999% pure.

[0035] ● Photoetching Ni film into a grid-lik...

Embodiment 2

[0045] Referring to the preparation method and steps of Example 1: the difference is that the thickness of the polyimide substrate is 25um, and the size is 5 × 2mm 2 , one plate can photoetch 250 thin-film Ni resistor units, and the solder pads leading out from the Ni resistor lines are distributed at both ends without a metal frame, such as Figure 4 As shown, the square resistance plating of the Ni resistor is thickened to 50mΩ, the resistance value of the thin-film nickel resistor sensor is set to 100Ω at 0°C, and the total thickness of the device is 35um. The sensor is used to detect the temperature of the solid surface. When in use, the sensing film is directly attached to the solid surface to be measured with thermal conductive glue.

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Abstract

The present invention discloses a flexible matrix film nickel resistance sensor, comprising a substrate, a resistance cord attached to the substrate and a welding disk. The sensor adopts that on a high temperature resistant polyimide film substrate, a conductive layer is produced by a method of vacuum evaporating Ni film, and then the Ni film is thickened by an electrochemical method. A resistor pattern is produced by a photolithography method, and the sensor is formed by electrochemically adjusting resistance value, coating a protecting layer, curing and aging processing, arranging to a corresponding metal clamping frame. The sensor is fast in response speed, low in price and simple and feasible in manufacture method. The sensor solves the problem that the performance of holding devices is uniform, stable and reliable in mass production, and is particularly suitable for vehicle air intake hotwire flowmeters and other thermal resistance testing systems which require quick response.

Description

technical field [0001] The invention relates to a fast-response film Ni resistance sensor and a manufacturing method thereof. The sensor is especially suitable for automotive air intake hot-wire flow meters and other thermal resistance test systems that require fast response. Background technique [0002] Thermal resistance sensors have a long history, but with the development of science and technology, on the one hand, some new special requirements are constantly put forward, and on the other hand, new means are provided to continuously improve the performance of such sensors. From the perspective of sensitive materials, platinum resistance has a long history. It has outstanding advantages such as wide temperature range, good linearity, and good stability, but it also has the important limitation of high material cost. Copper, aluminum, silver, etc. have chemical Strong mobility and low melting point lead to low working temperature and poor corrosion resistance. In additio...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01F1/69G01K7/16H01C7/00
Inventor 朱精敏谌辉周凤丽
Owner HANGZHOU JINGCHENG PHOTOELECTRIC