Preparation method of high silicon orientation silicon steel thin plate

A technology of oriented silicon steel and thin plate, which is applied in the field of low-carbon high-silicon silicon steel thin plate preparation, can solve the problems of compositional uniformity, compactness and strength of the film, does not involve the specific preparation of high-silicon silicon steel, and the problem of silicon steel film peeling, etc., to achieve The effects of avoiding rolling defects and rolling difficulties, short diffusion annealing treatment time, and short preparation cycle

Inactive Publication Date: 2007-07-18
WUHAN UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The above documents and patents indicate that DC magnetron sputtering deposition method, radio frequency magnetron sputtering deposition method, ion beam sputtering deposition method, and multi-arc ion sputtering deposition method are only used for the preparation of ceramic coatings on the surface of silicon steel materials, and do not involve The specific preparation of high-silicon silicon steel, especially the problems existing in the preparation, rolling and heat treatment of silicon steel with high silicon content, such as the brittleness of silicon steel sheet increases due to the increase of silicon content, when the silicon content reaches 3.2% or more A sharp drop, various rolling defects are prone to occur during the rolling process, and problems such as deterioration of processing performance have not been resolved
The preparation method described in the Chinese patent "Ultra-thin, large-size, high-silicon silicon steel sheet electron beam physical vapor deposition preparation method" (CN1804109A) is an electron beam deposition method, and the deposited silicon steel film is deposited on CaF 2 On the powder, it can be used after peeling off at last, and for large-scale industrial production, there are still problems in the peeling off of the deposited silicon steel film; and because it has not been annealed, there are also problems in the uniformity of its composition, the compactness and strength of the film

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0014] The low-silicon silicon steel containing 2.5wt% silicon was placed in the sputtering chamber as the base material, and pure iron was deposited by DC magnetron sputtering and pure silicon and MnS is alternately deposited on both sides of the substrate to prefabricate the Fe / Si multilayer film deposition layer, wherein the thickness of the Fe layer is 2-3nm, the thickness of the Si layer is 0.1-1nm, and the thickness of the deposition layer is 5 times the thickness of the substrate plus the multilayer film. ~7%; and then into the sputtering chamber O 2 , using the ion beam sputtering deposition method to sputter the target Cr on the outer surface of the deposition layer to deposit a layer of Cr-containing spinel oxide coating; then perform diffusion annealing treatment, and finally perform rolling and recrystallization annealing treatment.

[0015] The grain size of the Fe / Si multilayer film prefabricated in this embodiment is regular and has orientation.

Embodiment 2

[0017] The industrial pure iron is used as the substrate in the sputtering chamber. Under the protective Ar atmosphere, the pure iron is deposited by DC magnetron sputtering deposition method, and the silicon material and MnS are alternately deposited on the substrate by radio frequency magnetron sputtering deposition method. On both sides, prefabricate the Fe / Si multilayer film deposition layer, wherein the thickness of the Fe layer is 5-10nm, the thickness of the Si layer is 1-4nm, and the thickness of the deposition layer is 11-13% of the base material plus the thickness of the multilayer film; O 2 , using the ion beam sputtering deposition method to sputter the target MgO on the outer surface of the deposition layer to deposit a layer of magnesium oxide coating; then carry out diffusion annealing treatment, and finally carry out rolling and recrystallization annealing treatment.

[0018] The grain size of the Fe / Si multilayer film prefabricated in this embodiment is regula...

Embodiment 3

[0020] The industrial pure iron is used as the base material to be placed in the sputtering chamber. Under the protective Xe atmosphere, the ferrosilicon alloy, Ti, Mo and V are simultaneously deposited on both sides of the base material by the multi-arc ion sputtering deposition method, and the high-silicon silicon is prefabricated. Iron alloy film deposition layer, the thickness of the deposition layer is 16% to 18% of the thickness of the base material plus alloy film; then pass N into the sputtering chamber 2 and O 2 , using the multi-arc ion sputtering deposition method to reactively sputter-deposit AlN, TiN and a layer of Cr-containing spinel oxide coating on the outer surface of the deposition layer of Al, Ti and Cr on the target materials; Surface treatment, finally rolling and recrystallization annealing.

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Abstract

The preparation process of high silicon orientation low carbon silicon steel sheet includes the technological steps of: sputtering target material onto two sides of low carbon silicon steel base material with silicon content lower than 3.0 wt % to form deposited layers of ferrosilicon film or multilayer Fe-Si film under vacuum or protecting atmosphere in a sputtering room; introducing N2 and / or O2 to the sputtering room to deposit Ti, Cr, Al or MgO target on the outer surface to form AlN, TiN, MgO or Cr-containing spinel type oxide coating; high energy particle implantation or diffusing annealing, rolling and final re-crystallization annealing treatment. The present invention has short preparation period, and the prepared high silicon orientation low carbon silicon steel sheet has very low surface C, P and O contents and deposited layer with crystal grains in regular size and orientation.

Description

Technical field: [0001] The invention belongs to a method for preparing a low-carbon high-silicon silicon steel sheet. In particular, it relates to a method for preparing a high-silicon orientation low-carbon high-silicon silicon steel sheet. Background technique [0002] High-silicon silicon steel has good electromagnetic properties, the silicon content increases, the iron loss decreases, the resistivity of the silicon steel sheet increases, and the eddy current loss decreases. When the silicon content in the silicon steel sheet reaches 6.5%, the magnetostriction coefficient tends to zero, so 6.5 %Si high silicon steel sheet is a kind of soft magnetic material with excellent performance. [0003] At present, the production of high-silicon silicon steel generally adopts traditional metallurgical smelting, and is produced by rolling (hot rolling, cold rolling) and annealing processes. Due to the increase of silicon content, the brittleness of silicon steel sheet increases. ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23F17/00C23C14/34C23C14/14C23C14/58B32B5/00
Inventor 吴隽从善海王蕾
Owner WUHAN UNIV OF SCI & TECH
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