A method for making the carbon nano tube electronic part

A technology for carbon nanotubes and electronic devices, applied in the field of preparing carbon nanotube electronic devices, can solve the problems of high cost, need for instruments, slow speed, etc., and achieve the effects of low cost, mild operating conditions and high yield
CN101009222AInactive Publication Date: 2007-08-01PEKING UNIV
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
PEKING UNIV
Publication Date
2007-08-01
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention discloses a method of producing carbon nanometer tube electronic elements; the method includes steps as following: 1) carbon nanometer tubes are distributed on the surface of base of the insulated dielectric layer; 2) metallic film is plated on the base of the insulated dielectric layer; 3) patterned self-packaged monolayer film is formed on the metallic film; 4) corrosion; 5) post treatment. Comparing with current method in literature, the invention possesses many unique advantages: the method is easy and without complex and expensive instrument; it belongs to parallel method and can proceed industry automatization and large scale integration; it can breach limit of photoetching technique and achieve the electrode space between of several dozens of nanometer; the operation condition is mild, it is at room temperature, so that chemical vapour deposition can not be used in low melting point metal can be avoided; the craft period is short, all the cause just needs about 5 hours; the efficient is high, cost is low, range of application is wide, it possesses capacious foreground of business.
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Description

technical field

[0001] The invention relates to a method for preparing a carbon nanotube electronic device, in particular to a method for preparing a carbon nanotube field effect transistor and an electrode structure using the carbon nanotube as a connecting wire. Background technique

[0002] Nanotubes have nanoscale diameters and are ideal one-dimensional materials. Carbon nanotubes have various excellent properties, especially their electrical properties (Acc. Chem. Res., 2002, 35, 1035-1044). Carbon nanotubes are two types of metallic and semiconducting due to their different orientations and diameters; metallic carbon nanotubes can be used to make leads, and semiconducting carbon nanotubes can be used as channel materials to make full carbon nanotubes device. Carbon nanotubes can withstand 10 9 A / cm 2 The current density is several orders of magnitude higher than that of metals; the strong force between carbon atoms makes the surface of carbon nanotubes have few def...

Claims

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