Micro-accelerometer and preparation method thereof
A technology of micro-accelerometer and intermediate substrate, which is used in the measurement of acceleration, velocity/acceleration/shock measurement, acceleration measurement using inertial force, etc. , the difficulty of fusion bonding process, etc., to achieve the effect of low acceleration measurement sensitivity limit, small zero random drift, and large measurement dynamic range
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[0047] Below in conjunction with accompanying drawing and specific embodiment the present invention is described in further detail:
[0048] figure 1 A cross-sectional view of the basic structure of the sensitive element of the micro-accelerometer processed by the micro-inertial device manufacturing method of the present invention is shown. The multilayer packaging substrate in the figure is formed by stacking flat upper surface board 1a, lower surface board 1b and 2a~g and other intermediate substrates. The materials are all LTCC, and become an integrated multilayer packaging substrate after sintering process. The signal detection circuit 4 can adopt a commercialized, general-purpose accelerometer signal detection circuit chip, or a specially designed signal detection circuit chip, which can be attached to the metal surface at the bottom of the groove 3 on the upper surface plate 1a. On the pads, the chip is electrically interconnected with the sensitive element through thes...
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