Method for preparing composite Ag-Ti oxide antibacterial film by magnetron sputtering

A magnetron sputtering and oxide technology, which is applied in sputtering coating, metal material coating process, vacuum evaporation coating, etc., can solve the problem of poor antibacterial spectrum and durability, difficulty in large-scale industrial production, and variable production High cost and other issues, to achieve the effect of reducing bacterial infection, durable antibacterial properties, and high uniformity

Inactive Publication Date: 2010-06-02
ZHEJIANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the existing technology still has disadvantages such as poor uniformity of the film produced, low antibacterial performance, poor antibacterial spectrum and durability in terms of operation and coating methods, and the variable cost of production is high, and it is difficult to produce on a large scale.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0058] Take a glass piece with a flat surface of 2cm×2cm, soak it in hydrochloric acid, wash it in acetone solvent for 10 minutes under ultrasonic conditions, then clean it in absolute ethanol for 5 minutes under ultrasonic conditions, take it out and wash it with deionized water Rinse for 15 minutes and dry at 15°C for 3 hours. The magnetron sputtering equipment with three targets is adopted, among which two targets (titanium targets) adopt intermediate frequency magnetron power supply, and the silver target adopts general magnetron power supply. When coating, first evacuate the system until the absolute pressure is below 0.001Pa, then pass in argon gas and pure oxygen as a reaction gas, control the flow rate of argon gas to 35 sccm, the flow rate of reaction gas to 20 sccm, and maintain the system pressure at 2Pa. Under the temperature condition of 250°C, first turn on the intermediate frequency magnetron sputtering power supply and sputter metal titanium first, and sputter ...

Embodiment 2

[0060] Take a 2cm x 2cm glass slide with a flat surface, and stick a piece of 1.5cm x 1.5cm non-woven fabric on it, clean it in 75% ethanol for 15 minutes under ultrasonic conditions, and then clean it in acetone solvent for 10 minutes. After taking it out, rinse it with deionized water for 5 minutes, and dry it at 85°C for 0.5 hours. The magnetron sputtering equipment with three targets is adopted, among which two targets (titanium targets) adopt intermediate frequency magnetron power supply, and the silver target adopts general magnetron power supply. When coating, first evacuate the system until the absolute pressure is below 0.001Pa, then pass in argon and reaction gas air, control the flow rate of argon gas to 35 sccm, the flow rate of reaction gas to 20 sccm, and maintain the system pressure at 0.5 Pa. At a temperature of 20°C, turn on the intermediate frequency magnetron sputtering power supply to sputter metal titanium and the magnetron sputtering power supply to sputt...

Embodiment 3

[0062]Take a glass piece with a flat surface of 1cm×1cm, soak it in hydrochloric acid, clean it in acetone solvent under ultrasonic conditions for 10 minutes, then clean it in absolute ethanol for 10 minutes under ultrasonic conditions, and wash it in toluene under ultrasonic conditions. Rinse for 10 minutes, take it out, rinse with deionized water for 5 minutes, and dry at 30°C for 2 hours. The magnetron sputtering equipment with three targets is adopted, among which two targets (titanium targets) adopt intermediate frequency magnetron power supply, and the silver target adopts general magnetron power supply. When coating, first evacuate the system until the absolute pressure is below 0.001Pa, then pass in argon gas and pure oxygen as a reaction gas, control the flow rate of argon gas to 35 sccm, the flow rate of reaction gas to 20 sccm, and maintain the system pressure at 1.2Pa. Under the temperature condition of 80°C, first turn on the intermediate frequency magnetron sputt...

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PUM

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Abstract

The invention discloses a method for preparing a composite Ag-Ti oxide antibacterial film by magnetron sputtering, mainly comprising the steps of: 1) carrying out pretreatment on the surface of film carrier base material, sequentially washing by more than two organic solvents and deionized water under the condition of ultrasonic wave, the washing time by using the organic solvents and the deionized water being 5-15min, and finally, drying at 15-85 DEG C for 0.5-3h under the vacuum condition; 2) arranging a metal Ti target and a metal Ag target on a magnetron sputtering device, taking argon as working gas, filling reaction gas containing oxygen into a vacuum chamber of the magnetron sputtering device, sputtering the metal Ti by an intermediate frequency magnetron sputtering power supply of the magnetron sputtering device, sputtering the Ag by the magnetron sputtering power supply, and obtaining Ag-Ti metal oxide composite coating film. The method is simple and efficient, and the obtained film has high uniformity, good dispersibility and strong adhesive force, so as to be taken as antibacterial material which has the advantages of broad spectrum, high efficiency, permanent antibacterial performance, safety and environmental protection.

Description

technical field [0001] The invention relates to a preparation method of a composite silver-titanium oxide film. Background technique [0002] 1. Thin film preparation technology [0003] Surface coating technology is one of the important preparation technologies in the modern material industry. It uses the base material to prepare a thin surface layer with special properties such as corrosion resistance, wear resistance, high temperature resistance and damage resistance, which greatly broadens the application of the base material. field. Surface preparation technologies mainly include electroplating, chemical plating, physical vapor deposition, chemical vapor deposition, thermal spraying, sol-gel method, etc., each of which has a wide range of applications in different industrial fields. [0004] Among the above-mentioned coating technologies, the sol-gel method (Sol-gel) is the most commonly used method for preparing composite thin films. A thin film with specific propert...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/35C23C14/08C23C14/02C23C14/54
Inventor 吴韬杨文平王琦丁靓王海华
Owner ZHEJIANG UNIV
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