Silicon nitride material and preparation method thereof, as well as silicon nitride heating device and production method thereof
A silicon nitride heating device, silicon nitride technology, applied in the direction of heating element materials, etc., to achieve the effect of light weight, good fluidity and low density
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preparation example Construction
[0051] figure 1 It is a flowchart of the preparation method of the silicon nitride material according to the present invention, such as figure 1 Shown, the preparation method of silicon nitride material of the present invention comprises the following steps:
[0052] 1) Weigh the raw materials according to the following weight percentages: 78%-98% silicon nitride powder, 0.2%-9% aluminum oxide, 0.2%-9% yttrium trioxide and 0.05%-5% tungsten carbide. Put it into an alumina ceramic tank, add abrasives and grinding media, and ball mill and stir for 8 to 40 hours;
[0053] 2) Sieve the ball-milled slurry, put it into an oven, dry at a temperature of 50-120°C for 4-20 hours, and granulate by cold isostatic pressing or spray drying under a pressure of 30MPa-120MPa to obtain silicon nitride Powder.
[0054] figure 2 It is a flow chart of the preparation method of the silicon nitride heating device described in the present invention, such as figure 2 As shown, the preparation...
Embodiment 1
[0058] 92.5g of silicon nitride powder with an average particle size of 0.6μm (in which the content of α-phase silicon nitride exceeds 96%), 3g of aluminum oxide with an average particle size of 0.4μm, and 4g of trioxide with an average particle size of 0.5μm Put diyttrium and 2g tungsten carbide into a special container for ball milling, add ethanol of the same weight, put it into the grinding medium silicon nitride, and ball mill for 10 hours, then put it in an oven at 80°C for 6 hours, and then cool the powder at 100MPa Static pressure granulation, the particle size of the obtained silicon nitride base material powder is about 150 microns, and then put it into a prefabricated mold, and at the same time, tungsten wire is embedded in the silicon nitride base material as a resistance heating element as required. 150MPa cold isostatic pressing, the formed blank is placed in a sintering furnace, protected by a nitrogen atmosphere, and sintered in the following heating process: wi...
Embodiment 2
[0061] Put 89g of silicon nitride powder with an average particle size of 6 microns, 4g of aluminum oxide with an average particle size of 5 microns, 4g of diyttrium trioxide with an average particle size of 7 microns, and 3g of tungsten carbide in a container dedicated to the ball mill , add the same weight of ethylene glycol, put it into the grinding medium silicon nitride and ball mill for 40 hours, then put it in an oven at 120°C for 20 hours, granulate the powder at 60MPa cold isostatic pressure, and then put it into the prefabricated In the mold, put the designed metal tungsten wire according to the predetermined position, form it at 160MPa cold isostatic pressing, put it into a precision argon atmosphere sintering furnace, pass it into the argon atmosphere protection, and sinter in the following heating process. Raise the temperature to 1000°C within an hour, then pressurize to 0.1MPa at the same time as the temperature rises, continue to raise the temperature to 1300°C,...
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