Monocrystalline silicon piece texturizing liquid and texturizing method thereof
A single crystal silicon wafer and texturing liquid technology, which is applied in the directions of single crystal growth, single crystal growth, chemical instruments and methods, etc. The problem of high fragmentation rate can achieve the effect of small thinning, clear spire and smooth and even response.
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Embodiment 1
[0023] Embodiment 1: A kind of monocrystalline silicon wafer texturing liquid
[0024] In parts by mass, sodium hydroxide is 0.6%, isopropanol is 4.5%, additives are 0.4%, and water is 94.5%. The proportion of additives is in parts by mass, glucose 0.5%, nonylphenol polyoxyethylene ether 1500ppb, sodium lactate 0.5%, propylene glycol 0.1%, sodium silicate 0.2%, sodium carbonate 0.2%, and the rest is water.
Embodiment 2
[0025] Embodiment 2: another monocrystalline silicon wafer texturing liquid
[0026] In parts by mass, sodium hydroxide is 0.5%, isopropanol is 8%, additives are 0.1%, and water is 94.5%. The proportion of additives is in parts by mass, glucose 2%, decylphenol polyoxyethylene ether 6000ppb, sodium citrate 0.1%, propylene glycol 0.05%, sodium silicate 0.1%, sodium carbonate 0.05%, and the rest is water.
Embodiment 3
[0027] Example 3: Yet another texturing solution for monocrystalline silicon wafers
[0028] In parts by mass, sodium hydroxide is 1.5%, isopropanol is 4%, additives are 1.2%, and water is 94.5%. The proportion of additives is in parts by mass, potassium gluconate 0.1%, nonylphenol polyoxyethylene ether 800ppb, sodium lactate 1.5%, propylene glycol 1.2%, sodium silicate 4%, sodium bicarbonate 1%, and the rest is water.
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