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High-tenacity oxidation-resistant anti-friction coating on substrate surface and preparation method thereof

A high-toughness, anti-oxidation technology, applied in coatings, metal material coating processes, ion implantation plating, etc., can solve problems such as low high temperature oxidation resistance and built-up edge

Active Publication Date: 2011-04-20
NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

But in actual production, nc-TiN / a-Si 3 N 4 The high coefficient of friction of the composite coating causes a lot of heat to be generated during the cutting process, and the rake face of the coated tool still produces built-up edge
The actual TiAlCN coating in the form of nc-TiAlCN / a-C composite coating maintains high toughness while its friction coefficient can be as low as 0.3, which is a model for the improvement of wear-reducing performance of hard wear-resistant coatings, but nc-TiAlCN The high temperature oxidation resistance of / a-C composite coating is relatively low

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0023] The tungsten carbide blade and the Si wafer substrate were mechanically polished, then ultrasonically cleaned with acetone, dried, and placed in the chamber of the self-developed P600 type FCVA cathodic arc sputtering hybrid deposition equipment, and pre-evacuated to 2×10 -3 Pa. Among them, FCVA is the abbreviation of English Filtered cathodic vacuum arc, and the Chinese name is magnetic filter cathodic vacuum arc.

[0024] (1) Pass argon gas into the coating chamber through the ion source of the cathode layer to maintain the pressure of the argon gas at 0.1Pa, apply a pulse bias voltage of -500V on the substrate, turn on the ion source of the cathode layer, and use the ionization Argon ions etch the surface of the substrate, and this process lasts for 30 minutes;

[0025] (2) Feed nitrogen and argon into the coating cavity through the ion source of the cathode layer, keep the partial pressure of argon at 0.1Pa, the partial pressure of nitrogen at 2Pa, control the temp...

Embodiment 2

[0029] The high-speed steel rotor and the Si wafer substrate were mechanically polished, then ultrasonically cleaned with acetone, dried, and placed in the cavity of the self-developed P600 type FCVA cathodic arc sputtering hybrid deposition equipment, and pre-evacuated to 2×10 -3 Pa.

[0030] (1) Pass argon gas into the coating cavity through the ion source of the cathode layer to maintain the pressure of the argon gas at 0.1Pa, apply a pulse bias voltage of -500V on the substrate, turn on the ion source of the cathode layer, and use the ionization Argon ions etch the surface of the substrate, and this process lasts for 20 minutes;

[0031] (2) Introduce nitrogen and argon into the coating chamber through the ion source of the cathode layer, keep the partial pressure of argon at 0.1Pa, the partial pressure of nitrogen at 2Pa, control the temperature in the chamber at 450°C, and the Ti target arc flow of the cathode arc as 70A, the substrate pulse bias voltage is -150V, and t...

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Abstract

The invention discloses a high-tenacity oxidation-resistant anti-friction coating on a substrate surface and a preparation method thereof. The coating is characterized in that nano-crystalline AlCrCN particles of a face-centered cubic structure are embedded into grids of diamond-like carbon with nano-thickness to form the composite coating, wherein the diameter of each nano-crystalline AlCrCN particle is 5-50 nanometers, the thickness of each grid of the diamond-like carbon is 1-5 nanometers, and the molar ratio of Al atoms to Cr atoms is greater than 1. The coating has higher oxidation resistance, also combines higher tenacity of ceramic composite materials and excellent friction performance of diamond-like carbon, can reduce the adhesion between abrasive dust and a substrate, is suitable for surfaces of cutters, molds and other substrates, and is especially suitable for low-speed processing of titanium-nickel alloy.

Description

technical field [0001] The invention belongs to the technical field of material surface coating, in particular to a high-toughness anti-oxidation and anti-friction coating on the surface of a substrate and a preparation method thereof. Background technique [0002] With the development of the country's advanced manufacturing industry, the widespread use of many hard and viscous materials such as titanium alloys and nickel alloys poses unprecedented challenges to traditional hard alloy or high-speed steel cutting tools. Although PVD ceramic tool coatings represented by TiN have been widely used in improving the processing efficiency of various alloys, and subsequent TiC, TiCN, ZrN, TiAlN, AlTiN, TiAlCN, CrAlN, nc-TiN / a- Si 3 N 4 Such coatings have been developed and applied, but because of the oxidation of the coating by high temperature during cutting, the adhesive wear of chips on the coating, and the brittleness of the coating itself, the problem of difficult machining o...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/06C23C14/38
Inventor 汪爱英陈锋光孙丽丽
Owner NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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