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Ionic liquid filled porous silicon optical VOC sensor array and preparation method thereof

An ionic liquid and sensing array technology, which is applied in the direction of material analysis, scientific instruments, phase influence characteristic measurement by optical means, etc., can solve the problems of poor gas response repeatability, difficult to accurately control the preparation process, etc. High speed, enhanced discrimination, optimized selectivity and sensitivity

Active Publication Date: 2016-08-24
ZHEJIANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In practical applications, the mass-type quartz crystal microbalance array sensor is easy to operate and has high sensitivity, but its quality detection accuracy is affected by various factors such as the stability of the quartz crystal, the accuracy of frequency measurement, and the interference of the oscillation circuit.
At the same time, it is difficult to precisely control the preparation process of polymer array sensitive materials, and the repeatability of different batches of polymer materials to gas responses is poor.
In contrast, optical gas sensors have the advantages of simple structure, strong anti-electromagnetic interference ability, fast response and recovery speed, etc., but there are still relatively few studies on optical gas sensor arrays.

Method used

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  • Ionic liquid filled porous silicon optical VOC sensor array and preparation method thereof
  • Ionic liquid filled porous silicon optical VOC sensor array and preparation method thereof
  • Ionic liquid filled porous silicon optical VOC sensor array and preparation method thereof

Examples

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Embodiment example 1

[0032] The invention discloses an ionic liquid-filled porous silicon optical VOC sensing array. The array is composed of a plurality of gas sensing units with cross-sensitive response to VOC (ie, volatile organic compounds). The gas sensing units are filled in nanoporous Silicon Photonic Crystals Composed of Ionic Liquid Arrays. The first sensing microarray preparation process is:

[0033] (1) Cover the surface of P-type boron-doped single crystal silicon uniformly with a layer of SU-8 photoresist by using a glue machine, and transfer the microarray design pattern on the photolithography mask to the photoresist layer through the principle of ultraviolet exposure imaging superior;

[0034] (2) Use the P-type boron-doped single crystal silicon of the above-mentioned SU-8 photoresist array as the anode, and the platinum electrode as the cathode, add absolute ethanol at a ratio of 1:3-6 by volume and a concentration of 40% by weight Hydrofluoric acid is used as electrolyte for e...

Embodiment example 2

[0037] A method for preparing an ionic liquid-filled porous silicon optical VOC sensing array, the method comprising the following steps:

[0038] (1) Use p-type boron-doped single crystal silicon as the anode, platinum electrode as the cathode, add absolute ethanol and hydrofluoric acid with a weight concentration of 40% as the electrolyte at a volume ratio of 1:3 to 6, and perform electrolysis For etching, set the fluctuation range of current intensity to 35-100mA, each fluctuation period is 5-9 seconds, and the number of repeated fluctuations is 30-75 times. After etching, clean the silicon wafer with ethanol several times, and then dry it with nitrogen. ; Thermal oxidation treatment or ozone oxidation treatment at 400-600° C. for 1-2 hours on the above-etched silicon wafer to form porous silicon with reflection and light filtering properties on the surface;

[0039] (2) Select PDMS of appropriate size and use a hole punch to prepare multiple hole arrays with a diameter of ...

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Abstract

The invention specifically relates to an ionic liquid filling type porous silicon optical VOC sensor array and a preparation method thereof, belonging to the field of manufacturing and detection technology for gas sensors. The sensor array is used for identification and detection of VOC. The array is composed of a plurality of gas-sensitive units with cross sensitivity response to VOC, each gas-sensitive unit is composed of an ionic liquid array filled in a nanometer porous silicon photonic crystal, and ionic liquid accounts for more than 80% of the porosity of a porous silicon layer. The optical VOC sensor array is used at normal temperature, so the operating temperature of the sensor is substantially reduced; the ionic liquid does not volatilize at normal temperature and is extremely stable; an optical signal of an array sensor can be obtained through CCD imaging, and accurate light intensity change data can be transmitted and obtained through an optical fiber and a micro fiber spectrometer; moreover, the signal response and the recovery speed ratio of the sensor array are obviously faster than those of other types of sensing materials, response time of the sensor array to VOC is 40 s, recovery time is no more than 1 min, and the sensor array has good anti-electromagnetic interference performance.

Description

technical field [0001] The invention belongs to the technical field of gas sensor manufacturing and detection, and in particular relates to an ionic liquid-filled porous silicon optical sensing array and a preparation method thereof. The sensing array can be used for identification and detection of volatile organic gases (VOC). Background technique [0002] Volatile Organic Compounds (Volatile Organic Compounds, referred to as VOC) is one of the most common toxic and harmful air pollutants. The U.S. Department of Energy, EPA and the University of California have conducted an assessment of the risk of environmental pollutants to life, and found that VOC has a huge impact on human health. Therefore, the detection of VOC in the air is of great significance for the protection of human life, health and safety. More and more attention has been paid to the research on VOC detection technology at home and abroad. At present, large-scale analytical instruments, such as gas chromato...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N21/49G01N21/41G01N21/01
Inventor 邬建敏张海娟王肖波朱相融
Owner ZHEJIANG UNIV