Preparation method for metal carbide coating

A metal carbide and coating technology, applied in metal material coating process, coating, sputtering and other directions, can solve the problems of reducing the performance of the coating, the carbon content cannot be accurately controlled, and the friction coefficient is high, and achieve a low friction coefficient. , excellent performance, prolong service life effect

Inactive Publication Date: 2014-05-28
西安金唐材料应用科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

That is, the carbon content in the prepared metal carbide coating is controlled by a mass flow meter. Due to the fact that the carbon content of the carbide coating prepared by this method cannot be accurately controlled, the coating has high

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0021] After cleaning and drying the sample, put it into the vacuum chamber of the two-target magnetron sputtering equipment. The two targets are metal titanium target and graphite target, and the vacuum chamber is evacuated to 3×10 -5 Pa, argon gas is introduced, the flow rate is 18 sccm, the metal titanium target and the graphite target are turned on, the current of the metal titanium target is 1.5A, and the current of the graphite target is 2.9 A; the time is 1.5 h; after the coating is completed, inflate and take out the sample. The thickness of the titanium carbide coating obtained by this process is 3.6 μm , the hardness is: 2350 HV (under the load of 150g), the friction coefficient is: 0.23.

Embodiment 2

[0023] After cleaning and drying the sample, put it into the vacuum chamber of the two-target magnetron sputtering equipment. The two targets are metal chromium target and graphite target, and the vacuum chamber is evacuated to 3.5×10 -5 Pa, argon gas was introduced, the flow rate was 20 sccm, the metal chromium target and the graphite target were turned on, the current of the metal chromium target was 2.2 A, and the current of the graphite target was 3.5 A; the time was 0.6 h; after the coating was completed, the gas was inflated, and the sample was taken out. The thickness of the chromium carbide coating obtained by this process is 2.2 μm , the hardness is: 2700 HV (under the load of 150g), the friction coefficient is: 0.21.

Embodiment 3

[0025] After cleaning and drying the sample, put it into the vacuum chamber of the two-target magnetron sputtering equipment. The two targets are metal tungsten target and graphite target, and the vacuum chamber is evacuated to 4×10 -5 Pa, argon gas was introduced, the flow rate was 15 sccm, the metal tungsten target and the graphite target were turned on, the current of the metal tungsten target was 2.6 A, and the current of the graphite target was 4.5 A; the time was 2.0 h; after the coating was completed, inflate and take out the sample. The thickness of the tungsten carbide coating obtained by this process is 4.8 μm , the hardness is: 2800 HV (under the load of 150g), the friction coefficient is: 0.26.

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Abstract

The invention discloses a preparation method for a metal carbide coating. The metal carbide coating is prepared by adopting a multi-target magnetron sputtering equipment, taking pure metals (titanium, chromium and the like) and graphite as target materials, and performing the processes of vacuumizing, introducing argon, coating and the like. The preparation method for the metal carbide coating disclosed by the invention has the characteristics that the process is simple and stable, the coating components are controlled accurately, the processes are few, and the industrial production is easy to realize. The prepared metal carbide coating has the performance of high hardness, low friction coefficient and the like, and is suitable for performing deposition on the surfaces of a high-speed operating tool, a precise tool, a mold and the like; a workpiece can be endowed with high performance; the service life of a product can be prolonged.

Description

technical field [0001] The invention relates to a preparation technology of a metal carbide coating, which belongs to the technical field of material surface engineering. Background technique [0002] Metal carbides refer to compounds formed by metal elements such as tungsten, titanium, tantalum, molybdenum, zirconium, hafnium, vanadium, niobium, chromium and carbon. Commonly used metal carbide coatings include titanium carbide, chromium carbide, tungsten carbide, etc. Metal carbide coating is a coating material with high melting point, high hardness, good wear resistance, heat resistance and corrosion resistance. It has high resistance to mechanical friction and abrasive wear, excellent thermal conductivity, and excellent chemical stability. Its expansion coefficient is similar to that of cemented carbide, so it is firmly combined with the substrate and is suitable for coating of cemented carbide blades. [0003] Among various tool and die coating materials, metal carbide ...

Claims

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Application Information

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IPC IPC(8): C23C14/35C23C14/06
Inventor 赵树辉
Owner 西安金唐材料应用科技有限公司
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