Preparation method of micro-fluidic chip for sequencing
A microfluidic chip and sequencing technology, applied to laboratory containers, chemical instruments and methods, and techniques for producing decorative surface effects, etc., can solve the problems of low sequencing throughput and low accuracy, and achieve detection Simplicity, high precision, large effective area effect
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Embodiment 1
[0022] A method for preparing a microfluidic chip for sequencing, comprising the following steps:
[0023] Step 1: Take a single-sided polished substrate, the chip has a chip length of 49mm, a width of 48mm, a thickness of 2mm, and the material is an optical fiber;
[0024] Step 2: Bath in N,N-dimethylformamide water for 20 minutes at 90°C, then rinse with water for 1 minute; blow dry;
[0025] Step 3: Apply photoresist on the polished surface of the chip, and form a reaction pool pattern on the surface by exposure. The effective area of the chip is 27.6x27.6mm 2 ;
[0026] Step 4: Etch the chip by plasma etching to form 700,000 to 710,000 reaction pools with a diameter of 28 μm;
[0027] Step 5: Bath in N,N-dimethylformamide water for 30 minutes, soak in sulfuric acid hydrogen peroxide mixture for 30 minutes, H 2 SO 4 and H 2 o 2 The volume ratio is 3:1, rinse with water for 1.5min;
[0028] Step 6: Complete the preparation of the chip. Spray boron carbide paint eve...
Embodiment 2
[0030] A method for preparing a microfluidic chip for sequencing, comprising the following steps:
[0031] Step 1: Take a single-sided polished substrate, the chip has a chip length of 49mm, a width of 48mm, a thickness of 2mm, and the material is an optical fiber;
[0032] Step 2: Bath in N,N-dimethylformamide for 30 minutes at 85°C, then rinse with water for 2 minutes; blow dry;
[0033] Step 3: Apply photoresist on the polished surface of the chip, and form a reaction pool pattern on the surface by exposure. The effective area of the chip is 27.6x27.6mm 2 ;
[0034] Step 4: Etching the chip to form 700,000 to 710,000 reaction pools with a diameter of 29 μm;
[0035] Step 5: Bath in N,N-dimethylformamide water for 20 minutes, soak in sulfuric acid hydrogen peroxide mixture for 60 minutes, H 2 SO 4 and H 2 o 2 The volume ratio is 2:1, rinse with water for 1min;
[0036] Step 6: Complete the preparation of the chip.
Embodiment 3
[0038] A method for preparing a microfluidic chip for sequencing, comprising the following steps:
[0039] Step 1: Take a single-sided polished substrate, the chip has a chip length of 49mm, a width of 48mm, a thickness of 2mm, and the material is an optical fiber;
[0040] Step 2: Bath in N,N-dimethylformamide water for 25 minutes at 100°C, then rinse with water for 4 minutes; blow and dry;
[0041] Step 3: Apply photoresist on the polished surface of the chip, and form a reaction pool pattern on the surface by exposure. The effective area of the chip is 27.6x27.6mm 2 ;
[0042] Step 4: Etch the chip by plasma etching to form 690,000 to 700,000 reaction pools with a diameter of 30 μm;
[0043] Step 5: Bath in N,N-dimethylformamide water for 20 minutes, soak in sulfuric acid hydrogen peroxide mixture for 40 minutes, H 2 SO 4 and H 2 o 2 The volume ratio is 3:1, rinse with water for 3 minutes;
[0044] Step 6: Complete the preparation of the chip.
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