Method of processing powder sample for argon ion beam cutting

Abstract

The invention relates to a method of processing a powder sample for argon ion beam cutting. The method comprises steps: resin and a hardener are mixed to obtain a first mixture, the first mixture is mixed with the powder sample to obtain a second mixture, and the second mixture is placed on a slide and put in a vacuum drier for vacuum pumping; a cover slip is taken to sweep the second mixture on the slide on the cover slip, the second mixture is laid in a semicircle shape at the edge at one side of the cover slip, the cover slip is then put on a temperature control heating table for being cured, and a cover slip with first cured resin is obtained; the cover slip with the first cured resin is fully coated with the first mixture, the coating thickness is flush with the highest point of the first cured resin on the cover slip, the cover slip is buckled on a silicon wafer upside down and cured on the temperature control heating table, the first mixture fully coating the cover slip is cured into second resin, and an embedded sample is obtained; and the end surface of the embedded sample is polished and smoothed, the embedded powder sample is exposed, and the powder sample can then be put in an ion beam cutter for cutting.

Description

technical field [0001] The invention relates to a processing method for powder samples cut by argon ion beams, belonging to the field of chemistry. Background technique [0002] The scanning electron microscope (SEM) can observe the high-magnification microscopic morphology of the sample, and can also conduct qualitative and quantitative analysis of the elements on the sample surface through accessories such as energy spectrometer (EDX), or use electron backscattering diffraction analyzer (EBSD) to analyze the surface of the sample. Grain orientation and phase analysis were performed. The scanning electron microscope tests the surface depth of the sample during this observation and analysis process, usually only within 100nm depth, which has high quality requirements for sample preparation. The traditional mechanical grinding method prepares the sample section, and the section inevitably has mechanical damage and contamination caused by the abrasive embedded in the sample. ...

AI Technical Summary

Problems solved by technology

[0005] Disadvantage 1: The powder sample is scattered all over the embedding block, and the argon ion beam only cuts a small area at the top of the embedding block, so the utilization efficiency of the powder sample is not high

Especially if there are only a few powder samples and the powder samples are too dispersed in the embedding block, the number of powder samples that can be cut is very limited, which is not conducive to microscopic observation and analysis

[0006] Disadvantage 2: During the argon ion beam cutting process, the front end of the embedding block must be attached to the baffle, and the area where the embedding block is close to the baffle is cut first, and there will be ion beam damage in the form of grooves phenomenon, also loses a large observation area

[0007] Disadvantage 3: The embedding process takes a long time

[0008] Disadvantage 4: The end face and sides of the resin embedding block need to be ground flat to meet the requirements of the ion beam cutter, which increases the workload

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