Preparation method of fluorescent nanometer standard plate
A technology of fluorescent nanometer and standard plate, which is applied in the field of preparation of fluorescent nanometer standard plate, can solve problems such as unsatisfactory arrangement of process links, unscientific and reasonable structure design of standard plate, and insufficient neat arrangement of fluorescent lines, etc. Less, easy and convenient operation, mild reaction conditions
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[0023] The present invention will be further described in detail below in conjunction with the accompanying drawings, so that those skilled in the art can implement it with reference to the description.
[0024] refer to figure 1 , this case proposes a method for preparing a fluorescent nano standard plate of an embodiment, including:
[0025] Step 1) Forming a metal layer 2 on the surface of the base layer 1 by electron beam evaporation or magnetron sputtering;
[0026] Step 2) Spin-coat the photoresist layer 3 on the surface of the metal layer 2; use electron beam lithography to expose the photoresist layer 3 at equal intervals, and form photoresist lines at equal intervals after development;
[0027] Step 3) Soak the photoresist lines in a silylating agent for surface silanization treatment to form a silane layer 4; the photoresist lines after development are quartz-like (SiO 2 ) structure, the surface has abundant hydroxyl groups, and the surface of the line structure ca...
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Abstract
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