Preparation method for micro-texturing three-layer composite lubricant thin film

Abstract

The invention discloses a preparation method for a micro-texturing three-layer composite lubricant thin film. The surface of monocrystalline silicon is etched to obtain a microcosmic rough structure with regular equilateral-hexagon array morphology, and then through molecular self-assembly, polymer and ionic liquid technologies, a (3-aminopropyl) trimethoxy silane (APS) substrate fixation thin film layer, a polydopamine (PDA) intermediate junction thin film layer, and a carboxyl imidazolium ionic liquid (IL-COOH) fixation / flow two-phase lubricant thin film are sequentially obtained on the surface of a micro-texturing silicon slice, and the micro-texturing three-layer composite lubricant thin film is formed. According to the micro-texturing three-layer composite lubricant thin film prepared through the preparation method, surface texture, a self-assembled molecular film, a polymer thin film and an ionic liquid thin film are integrated reasonably, and the tribology performance of the surface of the monocrystalline silicon is effectively improved. The preparation method has good application prospects in the micro electro mechanical system surface protection field.

Description

technical field

[0001] The invention belongs to the fields of solid surface tribology, micro-texture and film preparation, and in particular relates to a micro-textured three-layer composite lubricating film and a preparation method thereof. Background technique

[0002] With the development of micro-manufacturing technology, the tribological problems in micro-devices are very prominent. When the device scale is reduced from the millimeter scale to the micro scale, due to the scale effect and the larger specific surface area, the surface force between the micro surfaces has a more significant impact on the normal operation and service life of the device than the volume force. Friction and wear are the main cause of device failure. Therefore, lubricating film systems with excellent anti-friction and anti-wear properties are needed to improve the tribological properties of micro-device surfaces.

[0003] Surface texture can change the contact state of friction pairs, store l...

Examples

Embodiment 1

[0030] Example 1: The preparation of the micro-textured three-layer composite lubricating film of the square column regular hexagonal array is carried out in accordance with the following steps:

[0031] (1) Using inductively coupled plasma etching technology, the micro-textured regular morphology of square column regular hexagonal arrays with various geometric parameters is obtained on single crystal silicon wafers;

[0032](2) Dissociate the micro-textured single crystal silicon wafer into a size of 10mm×10mm, ultrasonically clean it in acetone, absolute ethanol and deionized water for 10min, and dry it with dry nitrogen. Then put it into the Piranha solution freshly prepared by 98% sulfuric acid and 30% hydrogen peroxide at a volume ratio of 7:3, keep it at 90°C for 30 minutes, rinse it repeatedly with deionized water, and blow it dry with nitrogen to obtain a micro-textured surface hydroxylation Monocrystalline silicon wafer;

[0033] (3) Dissolve (3-aminopropyl)trimethox...

Embodiment 2

[0036] Embodiment 2: The preparation of the micro-textured three-layer composite lubricating film with the regular hexagonal array micro-texture of the pits is carried out according to the following steps:

[0037] (1) Using inductively coupled plasma etching technology, the micro-textured regular morphology of regular hexagonal arrays of pits with various geometric parameters is obtained on single crystal silicon wafers;

[0038] (2) Dissociate the micro-textured single crystal silicon wafer into a size of 10mm×10mm, ultrasonically clean it in acetone, absolute ethanol and deionized water for 10min, and dry it with dry nitrogen. Then put it into the Piranha solution freshly prepared by 98% sulfuric acid and 30% hydrogen peroxide at a volume ratio of 7:3, keep it at 90°C for 30 minutes, rinse it repeatedly with deionized water, and blow it dry with nitrogen to obtain a micro-textured surface hydroxylation Monocrystalline silicon wafer;

[0039] (3) Dissolve (3-aminopropyl)tri...

technical field

[0001] The invention belongs to the fields of solid surface tribology, micro-texture and film preparation, and in particular relates to a micro-textured three-layer composite lubricating film and a preparation method thereof. Background technique

[0002] With the development of micro-manufacturing technology, the tribological problems in micro-devices are very prominent. When the device scale is reduced from the millimeter scale to the micro scale, due to the scale effect and the larger specific surface area, the surface force between the micro surfaces has a more significant impact on the normal operation and service life of the device than the volume force. Friction and wear are the main cause of device failure. Therefore, lubricating film systems with excellent anti-friction and anti-wear properties are needed to improve the tribological properties of micro-device surfaces.

[0003] Surface texture can change the contact state of friction pairs, store l...

Examples

Embodiment 1

[0030] Example 1: The preparation of the micro-textured three-layer composite lubricating film of the square column regular hexagonal array is carried out in accordance with the following steps:

[0031] (1) Using inductively coupled plasma etching technology, the micro-textured regular morphology of square column regular hexagonal arrays with various geometric parameters is obtained on single crystal silicon wafers;

[0032](2) Dissociate the micro-textured single crystal silicon wafer into a size of 10mm×10mm, ultrasonically clean it in acetone, absolute ethanol and deionized water for 10min, and dry it with dry nitrogen. Then put it into the Piranha solution freshly prepared by 98% sulfuric acid and 30% hydrogen peroxide at a volume ratio of 7:3, keep it at 90°C for 30 minutes, rinse it repeatedly with deionized water, and blow it dry with nitrogen to obtain a micro-textured surface hydroxylation Monocrystalline silicon wafer;

[0033] (3) Dissolve (3-aminopropyl)trimethox...

Embodiment 2

[0036] Embodiment 2: The preparation of the micro-textured three-layer composite lubricating film with the regular hexagonal array micro-texture of the pits is carried out according to the following steps:

[0037] (1) Using inductively coupled plasma etching technology, the micro-textured regular morphology of regular hexagonal arrays of pits with various geometric parameters is obtained on single crystal silicon wafers;

[0038] (2) Dissociate the micro-textured single crystal silicon wafer into a size of 10mm×10mm, ultrasonically clean it in acetone, absolute ethanol and deionized water for 10min, and dry it with dry nitrogen. Then put it into the Piranha solution freshly prepared by 98% sulfuric acid and 30% hydrogen peroxide at a volume ratio of 7:3, keep it at 90°C for 30 minutes, rinse it repeatedly with deionized water, and blow it dry with nitrogen to obtain a micro-textured surface hydroxylation Monocrystalline silicon wafer;

[0039] (3) Dissolve (3-aminopropyl)tri...

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