Silicon carbide vertical insulated gate bipolar transistor and production method thereof
A bipolar transistor and insulated gate technology, applied in the field of microelectronics, can solve the problems of increasing conduction power loss, weakening the conductance modulation effect, and being unfavorable for the parallel application of devices, so as to improve the switching speed of devices and reduce the switching loss of devices Effect
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[0033] Step 1, epitaxially grow the transition layer on the N+ silicon carbide substrate, such as image 3 As shown, the N+ type silicon carbide substrate is first cleaned by RCA standard; then a transition layer with a thickness of 20 μm is epitaxially grown on the front side of the N+ type silicon carbide substrate by low pressure hot wall chemical vapor deposition.
[0034] It should be noted that the growth conditions of the transition layer are: the temperature is 1600° C., the pressure is 100 mbar, the reaction gas is silane and propane, and the carrier gas is pure hydrogen.
[0035] It should be noted that the RCA standard cleaning method was first created by Kern and Puotinen in the RCA laboratory of N.J.Princeton in 1965, and thus got its name. RCA is a typical wet chemical cleaning method that is still the most commonly used. The cleaning method mainly includes the following cleaning solutions.
[0036] (1), SPM:H 2 SO 4 / H 2 o 2 120~150℃ SPM has high oxidation ...
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