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Oil-package acidic-ionic-liquid (AIL) polishing liquid for KDP (potassium dihydrogen phosphate) crystals

A technology of acidic ionic liquid and polishing fluid, which is applied in cross-application fields, can solve problems such as residue, uncontrollable removal rate, and low solubility, and achieve high selectivity and precise and controllable removal reactions

Active Publication Date: 2017-06-09
INST OF MACHINERY MFG TECH CHINA ACAD OF ENG PHYSICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, due to the strong deliquescence effect of water on the KDP crystal, the removal rate of the deliquescence micro-area on the crystal surface is uncontrollable during polishing, and small corrosion pits are easily generated on the surface, and the fineness of polishing removal is low.
The defects of the deliquescent polishing method based on the microemulsion are mainly attributed to: (1) Although the size of the water nuclei in the W / O microemulsion is at the nanometer level, the strength of the deliquescent effect of each water nuclei on the KDP crystal is uncontrollable, and in During the CMP process, due to the participation of mechanical action, the intensity of deliquescent action in the micro-area will be further enlarged, which will eventually lead to the difficulty in controlling the precision of chemical mechanical removal. The removal rate can only be controlled at the level of hundreds of nanometers. Processing is difficult to achieve
(2) Deliquescence forms KDP aqueous solution on the surface of KDP crystal crystal. Since the solubility of KDP aqueous solution in organic solvent (oil phase) is very low, residue and recrystallization will inevitably occur on the surface of KDP crystal, resulting in residual KDP microcrystals on the surface , affecting the surface quality
[0006] From the above analysis, it can be seen that chemical mechanical polishing technology is theoretically expected to achieve the goal of ultra-smooth and ultra-clean surface processing of KDP crystals. The problem

Method used

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Examples

Experimental program
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preparation example Construction

[0033] The ambient temperature for the preparation of the polishing solution is 20°C-25°C, the relative humidity is 30%-50%, and the air pressure is normal pressure.

[0034] The polishing liquid of the present invention is an acidic ionic liquid microemulsion in oil, and the quasi-ternary phase diagram of an oil phase, an acidic ionic liquid, a surfactant and a cosurfactant is used as a technical means to obtain an acidic ion in oil by drawing a phase diagram Single-phase microemulsion domains of liquid. In the single-phase microemulsion area, different ratios of polishing fluids were screened, and chemical mechanical polishing was used to polish the KDP crystal with the polishing fluid.

Embodiment 1

[0036] This embodiment implements according to the following steps:

[0037] (1) Obtaining the initial surface: the KDP crystal of 35 mm×35 mm cut by single-point diamond flying is used as the crystal to be polished;

[0038] (2) Preparation of oil-in-oil acidic ionic liquid microemulsion: the oil phase is cyclohexane, the dispersed phase solvent is isopropanol, the acidic ionic liquid is bistrifluoromethanesulfonimide (TFSI), and the surfactant is polyethylene glycol Diol octyl phenyl ether (Triton X-100), co-surfactant is n-octanol; when preparing, mix TFSI and isopropanol evenly, add dropwise to n-hexane, Triton X-100 and n-octanol In the mixed solution, wherein the mass percent of each component is 45:10:5:32:8, the microemulsion is marked as A polishing liquid;

[0039](3) Chemical-mechanical polishing experiment: A chemical-mechanical polishing machine was used to carry out the polishing experiment of KDP crystals, in which the dropping rate of polishing liquid A was 10...

Embodiment 2

[0043] This embodiment implements according to the following steps:

[0044] (1) Obtaining the initial surface: the KDP crystal of 35 mm×35 mm cut by single-point diamond flying is used as the crystal to be polished;

[0045] (2) Preparation of acidic ionic liquid microemulsion in oil: the oil phase is cyclohexane, and the dispersed phase solvent is [Hmim]PF 6 , the acidic ionic liquid is caprolactam phosphate ([NHCH]H 2 PO 4 ), the surfactant is polyethylene glycol octylphenyl ether (Triton X-100), and the co-surfactant is n-hexanol; during preparation, mix caprolactam phosphate and ethanol evenly, and add dropwise to cyclohexane, In the mixed solution of polyethylene glycol octylphenyl ether and n-hexanol, wherein the mass percent of each component is 50:10:5:30:5, the microemulsion is marked as B polishing solution;

[0046] (3) Chemical-mechanical polishing experiment: A chemical-mechanical polishing machine was used to carry out the polishing experiment of KDP crystal,...

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Abstract

The invention provides oil-package acidic-ionic-liquid (AIL) polishing liquid for KDP (potassium dihydrogen phosphate) crystals. The polishing liquid is composed of an oil phase, a dispersed phase solvent, acidic ionic liquid (AIL), a surfactant and a cosurfactant; under the action of the surfactant and cosurfactant, an AIL solution is wrapped in the oil phase as a dispersed phase, and an oil-package acidic-ionic-liquid microemulsion (AIL / O) is formed; during chemical-mechanical polishing, the AIL / O microemulsion is extruded and rubbed, AIL molecules break through an interfacial film to reach surfaces of the crystals and generate chemical reaction with surface bulges, and selective removal of the surfaces is realized; the AIL / O polishing liquid for the KDP crystals is simple in preparation and stable in property, reaction characteristics and chemical-mechanical technology of the KDP crystals are considered comprehensively; the polishing liquid has the advantages of both high selectivity in deliquescence polishing and organic acid / alkali corrosion polishing of the KDP crystals, flying-cut blade grains can be effectively weakened, surface roughness is lowered, and no residue is remained on the surface.

Description

technical field [0001] The invention belongs to the cross-application field of ultra-precision machining and synthesis of functionalized microemulsions, and in particular relates to an acidic ionic liquid in oil polishing liquid for KDP crystals. Background technique [0002] Potassium dihydrogen phosphate (KDP) crystal is a very good optical crystal developed in the 1940s. It is the only non-conductive material that can be used for laser frequency doubling, electro-optic modulation and photoelectric switching devices in optical systems such as ICF and strong laser weapons. Linear Optical Materials. In engineering applications, the surface quality requirements of KDP crystals are extremely high, such as ultra-smoothness, no surface defects, no stress residues, and no impurity residues, which are close to the limit of material processing. However, the KDP crystal material itself has the characteristics of soft and brittle, easy to deliquescence, sensitive to temperature chan...

Claims

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Application Information

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IPC IPC(8): C09G1/18
CPCC09G1/18Y02P20/54
Inventor 董会潘金龙王利利王超李晓媛高伟黄姝珂吉方王宝瑞
Owner INST OF MACHINERY MFG TECH CHINA ACAD OF ENG PHYSICS